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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 Journal of Electrical Engineering & Technology Journal of Electrical Engineering & Technology Vol.3 No.1
- 발행연도
- 2008.3
- 수록면
- 121 - 124 (4page)
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초록· 키워드
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This paper presents the fabrication and field emission of carbon nanotube field emitters for a micro mass spectrometer. The carbon nanotube is an adequate material as a field emitter since it has good characteristics. We have successfully fabricated a diode field emitter and a triode field emitter. Each field emitter has been constructed using several micromachining processes and a thermal CVD process. In the case of the diode field emitter, to increase the electric field, the carbon nanotubes are selectively grown on the patterned nickel catalyst layer. The electron current of the diode field emitter is 73.2 ㎂ when the anode voltage is 1100 V. That of the triode field emitter is 3.4 ㎀ when the anode voltage is 1000 V.
목차
Abstract
1. Introduction
2. Principle and Structure Design
3. Fabrication Process
4. Experimental Results
5. Conclusion
Acknowledgements
References
참고문헌 (6)
참고문헌 신청
1. [단행본] - E. Constantin / 1990 / Joseph Vardi and Benjamin Avi-Itzhak, Mass Spectrometry / Ellis Horwood
2. [학술대회논문] - J. H. Jung / 1997 / Improvement of Electron Emission Stability of Motip Feas By DLC Coating / Information Display, Proceedings of the Fourth Asian Symposium : 149 ~ 152
3. [학술지(정기간행물)] - G.. S. Choi / 2003 / Fabrication of high performance carbon nanotube field emitters / Microelectronic engineering 66 : 206 ~ 212
4. [학술지(정기간행물)] - W. D. Zhang / 2002 / Fabrication of vertically aligned carbon nanotubes patterns by chemical vapor deposition for field emitters / Diamond and related materials 11 (9) : 1638 ~ 1642
5. [학술지(정기간행물)] - Q. H. Wang / 1997 / Field emission from nanotube bundle emitters at low fields / Applied Physics Letters 70 (24) : 3308 ~ 3310
2. [학술대회논문] - J. H. Jung / 1997 / Improvement of Electron Emission Stability of Motip Feas By DLC Coating / Information Display, Proceedings of the Fourth Asian Symposium : 149 ~ 152
3. [학술지(정기간행물)] - G.. S. Choi / 2003 / Fabrication of high performance carbon nanotube field emitters / Microelectronic engineering 66 : 206 ~ 212
4. [학술지(정기간행물)] - W. D. Zhang / 2002 / Fabrication of vertically aligned carbon nanotubes patterns by chemical vapor deposition for field emitters / Diamond and related materials 11 (9) : 1638 ~ 1642
5. [학술지(정기간행물)] - Q. H. Wang / 1997 / Field emission from nanotube bundle emitters at low fields / Applied Physics Letters 70 (24) : 3308 ~ 3310
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