Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe

Atsushi Shibuya; Wei Gao; Yasuo Yoshikawa; Bing-Feng Ju; Satoshi Kiyono

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자료유형: 학술저널

저자정보: Atsushi Shibuya Wei Gao Yasuo Yoshikawa Bing-Feng Ju Satoshi Kiyono

저널정보: Korean Society for Precision Engineering International Journal of Precision Engineering and Manufacturing International Journal of Precision Engineering and Manufacturing Vol.8 No.2

발행연도: 2007.4

수록면: 26 - 31 (6page)

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A novel scanning probe measurement system was developed to enable precise profile measurements of micro-aspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A 50-㎛-diameter glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 ㎚. The performance of the new scanning probe measurement system was verified by experimental data.

#Micro-aspheric lenses #Profile measurements #Air-bearing stylus #Contact-mode probe #Micro-sphere

참고문헌 (8)

참고문헌 신청

1. [학술지(정기간행물)] - / 2003 / Microfabricated optical fiber with microlens that produces large field of-view 4957 : 46 ~ 55

2. [학술지(정기간행물)] - / 2005 / An algorithm for stylus instruments to measure aspheric surfaces 16 (5) : 1215 ~ 1222

3. [학술지(정기간행물)] - / 1992. / Technology and applications of grating interferometers in high-precision interferometers in high-precision measurement 14 : 147154 ~

4. [학술지(정기간행물)] - / 1986. / Heterodyne profiling instrument for the angstrom region 25 (22) : 41684172 ~

5. [학술지(정기간행물)] - / 2006 / Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage 30 (3) : 96 ~ 103

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