A High-speed Atomic Force Microscope for Precision Measurement of Microstructured Surfaces

Yuguo Cui; Yoshikazu Arai; Takemi Asai; BinFeng Ju; Wei Gao

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자료유형: 학술저널

저자정보: Yuguo Cui Yoshikazu Arai Takemi Asai BinFeng Ju Wei Gao

저널정보: Korean Society for Precision Engineering International Journal of Precision Engineering and Manufacturing International Journal of Precision Engineering and Manufacturing Vol.9 No.3

발행연도: 2008.6

수록면: 27 - 32 (6page)

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This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 ㎜ and 400 ㎜/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 ㎜ and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 ㎑. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 ㎜/s.

#Atomic force microscope #Height-speed imaging #Precision measurement #Constant height mode #Constant force mode #Slope compensation

참고문헌 (18)

참고문헌 신청

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2. [학술지(정기간행물)] - Stark, R. W / 2004 / Velocity Dependent Friction Laws in Contact Mode Atomic Force Microscopy / Ultramicroscopy 100 (3/4) : 309 ~ 317

3. [학술지(정기간행물)] - 진종한 / 2004 / Pitch Measurement of 150 nm ID-grating Standards Using an Nanometrological Atomic Force Microscope / International Journal of Precision Engineering and Manufacturing 5 (3) : 19 ~ 25

4. [학술지(정기간행물)] - Takemi Asai / 2007 / An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools / International Journal of Precision Engineering and Manufacturing 8 (2) : 54 ~ 58

5. [학술지(정기간행물)] - 김종안 / 2008 / Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation / International Journal of Precision Engineering and Manufacturing 9 (2) : 18 ~ 22

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