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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2004.12
- 수록면
- 37 - 43 (7page)
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이 논문의 연구 히스토리 (2)
2004
Nano/Micro-scale friction properties of Silicon and Silicon coated with Chemical Vapor Deposited (CVD) Self-assembled monolayers
Eui-Sung Yoon
,
R. A
,
vind Singh
외 3명
KTS International Journal
2004.12
학술저널
Nano-Micro-friction properties of Chemical Vapor Deposited(CVD) Self-assembled monolayers on Si-wafer
Eui-Sung Yoon
,
R.A
,
vind Shingh
외 2명
한국트라이볼로지학회 학술대회
2004.11
학술대회자료
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Nano/micro-scale friction properties were investigated on Si (100) and three self-assembled monolayers (SAMs) (PFOTC, DMDM, DPDM) coated on Si-wafer by chemical vapor deposition technique. Experiments were conducted at ambient temperature (24±l℃) and humidity (45±5%). Friction at nano-scale was measured using Atomic Force Microscopy (AFM) in the range of 0-40nN normal loads. In both Si-wafer and SAMs, friction increased linearly as a function of applied normal load. Results showed that friction was affected by the inherent adhesion in Si-wafer, and in the case of SAMs the physical/chemical structures had a major influence. Coefficient of friction of these test samples at the micro-scale was also evaluated using a micro-tribotester. It was observed that SAMs had superior frictional property due to their low interfacial energies. In order to study the effect of contact area on coefficient of friction at the micro-scale, friction was measured for Si-wafer and DPDM against Soda Lime balls (Duke Scientific Corporation) of different radii (0.25 ㎜, 0.5 ㎜ and 1 ㎜) at different applied normal loads (1500, 3000 and 4800 mN). Results showed that Si-wafer had higher coefficient of friction than DPDM. Further, unlike that in the case of DPDM, friction in Si-wafer was severely influenced by its wear. SEM evidences showed that solid-solid adhesion was the wear mechanism in Si-wafer.
목차
Abstract
Introduction
Experimental
Results and Discussion
Conclusions
References
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