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학술저널
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한국트라이볼로지학회 Tribology and Lubricants 한국윤활학회지 제21권 제5호
발행연도
2005.10
수록면
209 - 215 (7page)

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Nano/micro friction with the contact area was studied on Si-wafer (100) and diamond-like carbon (DLC) film. Borosilicate balls of radii 0.32 ㎛, 0.5 ㎛, 1.25 ㎛ and 2.5 ㎛ mounted on the top of AFM tip (NPS) were used for nano-scale contact and Soda Lime glass balls of radii 0.25 mm, 0.5 mm, 1 mm were used for micro-scale contact. At nano-scale, the friction between ball and surface was measured with the applied normal load using an atomic force microscope (AFM), and at micro scale it was measured using ball-on flat type micro-tribotester. All the experiments were conducted at controlled conditions of temperature (24±1℃) and humidity (45±5%). Friction was measured as a function of applied normal load in the range of 0-160 nN at nano scale and in the range of 1000 μN, 1500 μN, 3000 μN and 4800 μN at micro scale. Results showed that the friction at nano scale increased with the applied normal load and ball size for both kinds of samples. Similar behavior of friction with the applied normal load and ball size was observed for Si-wafer at micro scale. However, for DLC friction decreased with the ball size. This difference of in behavior of friction in DLC nano- and micro-scale was attribute to the difference in the operating mechanisms. The evidence of the operating mechanisms at micro-scale were observed using scanning electron microscope (SEM). At micro-scale, solid-solid adhesion was dominant in Silicon-wafer, while plowing in DLC. Contrary to the nano scale that shows almost a wear-less situation, wear was prominent at micro-scale. At nano- and micro-scale, effect of contact area on the friction was discussed with the different applied normal load and ball size.

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Abstract

1. 서론

2. 실험장치 및 방법

3. 실험 결과 및 고찰

4. 결론

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UCI(KEPA) : I410-ECN-0101-2010-551-001504997