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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 1991.7
- 수록면
- 114 - 120 (7page)
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초록· 키워드
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The adhesion strength of TiN films deposited on stainless steel (AISI304) was investigated by acoustic emission scratch test. The critical load for the films deposited on the polished substrates and the plasma-nitrided substrates was measured. It was very low (less than 5N) for the former but increased very rapidly with plasma nitriding time until it reached about 65N at 8hr which remained constant afterwards.
The improvement of adhesion seems to arise from the formation of micro-roughness and hardening effect of the substrate surface due to plasma-nitriding. The plasma-nitriding of the substrates before TiN deposition by sputtering could be used to industrial application such as dies, molds, cutting tools and wear resistant machine parts.
The improvement of adhesion seems to arise from the formation of micro-roughness and hardening effect of the substrate surface due to plasma-nitriding. The plasma-nitriding of the substrates before TiN deposition by sputtering could be used to industrial application such as dies, molds, cutting tools and wear resistant machine parts.
목차
Abstract
1. Introduction
2. Experimental procedure
3. Results and discussion
4. Conclusion
5. References
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