지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이용수
초록· 키워드
오류제보하기
Laser direct lithography (LDL) is an alternative patterning technique used to manufacture flexible electronics, microsensors, and microfluidic chips. In general, LDL provides high precision and resolution; however, its low processing speed significantly impedes its use in mass production and manufacturing. Recently, researchers have attempted to implement LDL using a high-speed laser scanning system to improve the low scanning speed, which is the contributor to low productivity, using high-speed laser scanning systems. In this study, we develop a high-speed LDL system using the rapid tilting of a Micro-Electro-Mechanical-Systems (MEMS) mirror to overcome the limitations of conventional LDL. This system offers advantages such as compact modularization, rapid scanning, linear motion, and cost effectiveness. The designed optical system affords a beam size of 11 µm within a focal depth of 0.9 mm as well as a scan width of up to 10 mm depending on the tilt of the MEMS mirror. In particular, the MEMS mirror-based LDL system can expose various pattern shapes by appropriately combining the scan speed and laser modulation. Several experiments are conducted using laser-diode modulation on a MEMS mirror with a driving frequency of 400 Hz. Finally, the experimental results of an MEMS mirror-based LDL system are analyzed to evaluate the potential applications of the proposed high-speed exposure process.
목차
ABSTRACT
1. 서론
2. 고속 빔 틸팅(tilting) 스캐닝
3. 실험결과 및 고찰
4. 결론
REFERENCES
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