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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2018.12
- 수록면
- 568 - 575 (8page)
이용수
초록· 키워드
오류제보하기
Various techniques to measure the three-dimensional (3D) surface profile of a 3D micro- or nanostructure have been proposed. However, it is difficult to apply such techniques directly to industrial uses because most of them are relatively slow, unreliable, and expensive. The HiLo optical imaging technique, which was recently introduced in the field of fluorescence imaging, is a promising wide-field imaging technique capable of high-speed imaging with a simple optical configuration. It has not been used in measuring a 3D surface profile although confocal microscopy originally developed for fluorescence imaging has been adapted to the field of 3D optical measurement for a long time. In this paper, to the best of our knowledge, the HiLo optical imaging technique for measuring a 3D surface profile is proposed for the first time. Its optical configuration and algorithm for a precisely detecting surface position are designed, optimized, and implemented. Optical performance for several 3D microscale structures is evaluated, and it is confirmed that the capability of measuring a 3D surface profile with HiLo optical imaging technique is comparable to that with confocal microscopy.
목차
I. INTRODUCTION
II. METHODS
III. RESULTS AND DISCUSSION
IV. CONCLUSION
REFERENCES
참고문헌 (28)
참고문헌 신청
F. Chen / 2000 / Overview of threedimensional shape measurement using optical methods / Opt. Eng 39:10~22
D. R. Lee / 2014 / High speed 3D surface profile without axial scanning: Dualdetection confocal reflectance microscopy / Meas. Sci. Technol 25
John Kuo / 2014 / Electron Microscopy: Methods and Protocols / Humana Press
D. B. Williams / 2009 / Transmission Electron Microscopy
K D Vernon-Parry / 2000 / Scanning electron microscopy: an introduction / III-Vs Rev 13:40~44
D. R. Lee / 2014 / High speed 3D surface profile without axial scanning: Dualdetection confocal reflectance microscopy / Meas. Sci. Technol 25
John Kuo / 2014 / Electron Microscopy: Methods and Protocols / Humana Press
D. B. Williams / 2009 / Transmission Electron Microscopy
K D Vernon-Parry / 2000 / Scanning electron microscopy: an introduction / III-Vs Rev 13:40~44
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