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논문 기본 정보

자료유형
학술저널
저자정보
Chong Ma (Chinese Academy of Sciences) Gang Chen (Chinese Academy of Sciences) Dingquan Liu (Chinese Academy of Sciences) Rongjun Zhang (Fudan University) Junbo He (Fudan University) Xudan Zhu (Fudan University) Daqi Li (Chinese Academy of Sciences)
저널정보
한국광학회 Current Optics and Photonics Current Optics and Photonics Vol.5 No.5
발행연도
2021.10
수록면
576 - 582 (7page)

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초록· 키워드

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Dichroic beam-splitter (DBS) with polarization-maintaining took an important role in the free space quantum telecommunication tests on the Micius satellite of China. In this presentation, we designed and prepared a 50 layer polarization-maintaining DBS coating by a dual ion beam sputtering deposition (Dual-IBS) method. In order to solve a stress problem, an 18 layer special anti-reflection (AR) coating with similar physical thickness ratio was deposited on the backside. By stress compensation, the surface flatness RMS value of the DBS sample decreased from 0.341 λ (@632.8 nm) to 0.103 λ while beam splitting and polarization maintaining properties were almost kept unchanged. Further, we discussed the mechanism of film stress and stress compensation by equation deduction and found that total stress had a strong relationship with the total physical thickness and the ratio of layer materials.

목차

Ⅰ. INTRODUCTION
Ⅱ. EXPERIMENTAL AND CHARACTERIZATION METHODS
Ⅲ. DESIGN AND PRODUCTION OF DBS SAMPLE
Ⅳ. FILM STRESS COMPENSATION OF DBS SAMPLE
Ⅴ. CONCLUSION
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