Combined Study on Conductive AFM and Damascene Process to Visualize Nano-Scaled Defects in Cr Thin Films on Polymer Substrate

정은욱                                    /Jeong Eun Wook; 권세훈; 정해도                                         /Haedo Jeong; 최영선                                         /Choe Youngson; 조영래                                         /Young-Rae Cho

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자료유형: 학술저널

저자정보: 정은욱 /Jeong Eun Wook 권세훈 정해도 /Haedo Jeong 최영선 /Choe Youngson 조영래 /Young-Rae Cho

저널정보: 대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.11 No.1

발행연도: 2015.1

수록면: 164 - 169 (6page)

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The evolution of a direct observation technique for small-sizeddefects in a thin film is important in understanding of a water-vaporbarrier layers. An investigation into the availability of directobservation techniques for detecting nano-scaled defects in achromium thin film on a polymer substrate was performed. The bestimages of nano-scaled defects in Cr thin films were obtained usingconductive atomic force microscopy (C-AFM) in conjunction with adamascene process. When a dielectric Al2O3 layer was filled into thedefects, such as voids or grain boundaries, in the Cr coating via thisdamascene process, a distinctive conductivity image was obtainedfrom C-AFM. The major role of the dielectric material of the Al2O3layer, when filled into the nano-scaled defects in the Cr coating, wasthe generation of different values in conductivity during the C-AFManalysis. The results confirmed that the combination of C-AFM andthe filling of the dielectric Al2O3 layer into the defects via thedamascene process is a useful method for the direct observation ofnano-scaled defects comprised of deep and narrow trenches inmetallic thin films on a polymer substrate.

#nano-scaled defect #C-AFM #damascene process #direct observation #thin film #electrical conductivity

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참고문헌 신청

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김정호 / 2014 / Improvement of Light Out-Coupling Efficiency in Organic Light-Emitting Diodes with Variable Nanopatterns / Electronic Materials Letters 10(1):27~29

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