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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2021.1
- 수록면
- 222 - 228 (7page)
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We report on a method for fabricating solution-processed triple-multi-stacked indium zinc oxide (IZO) thin-fi lm transistors(TFTs) at a low annealing temperature using an oxygen plasma treatment technique at diff erent RF power levels of 120 W,150 W, 180 W, and 210 W. The oxygen plasma post-treatment is an additional process to optimize the surface state of IZOfi lms and to improve the electrical performance of the TFT device after using a low-temperature solution process insteadof a high-temperature annealing process. The plasma-treated TFT device exhibits improved electrical performance, withmobility of 5.1 ± 0.5 cm 2 /Vs, an on/off ratio of 2.5 × 10 8 , a threshold voltage of 2.6 ± 1.3 V, and a subthreshold swing of0.6 ± 0.1 V/dec when the RF power is 150 W. Therefore, the multi-stacked activity structure and the low RF power plasmapost-treatment process provides a simple and effi cient fabrication method that reduces the processing temperature, improvesthe electrical properties, and can be widely used in fl exible electronic devices.
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참고문헌 (36)
참고문헌 신청
Kamiya, T. / 2010 / Present status of amorphous In-Ga-Zn-O thin-fi lm transistors / Sci. Technol. Adv. Mater 11:044305
최운섭 / 2019 / Electrical Properties of a ZTO Thin‑Film Transistor Prepared with Near‑Field Electrohydrodynamic Jet Spraying / Electronic Materials Letters 15(2):171~178
Nikhil Tiwale / 2019 / Optimization of Transistor Characteristics and Charge Transport in Solution Processed ZnO Thin Films Grown from Zinc Neodecanoate / Electronic Materials Letters 15(6):702~711
Nomura, K. / 2004 / Room-temperature fabrication of transparent fl exible thin-fi lm transistors using amorphous oxide semiconductors / Nature 432:488
Altintas Yildirim, O. / 2016 / Facile synthesis of cobalt-doped zinc oxide thin fi lms for highly effi cient visible light photocatalysts / Appl. Surf. Sci 390:111~121
최운섭 / 2019 / Electrical Properties of a ZTO Thin‑Film Transistor Prepared with Near‑Field Electrohydrodynamic Jet Spraying / Electronic Materials Letters 15(2):171~178
Nikhil Tiwale / 2019 / Optimization of Transistor Characteristics and Charge Transport in Solution Processed ZnO Thin Films Grown from Zinc Neodecanoate / Electronic Materials Letters 15(6):702~711
Nomura, K. / 2004 / Room-temperature fabrication of transparent fl exible thin-fi lm transistors using amorphous oxide semiconductors / Nature 432:488
Altintas Yildirim, O. / 2016 / Facile synthesis of cobalt-doped zinc oxide thin fi lms for highly effi cient visible light photocatalysts / Appl. Surf. Sci 390:111~121
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Effects of Pre-annealing on the Performance of Solution-processed Indium Zinc Oxide Thin-film Transistors
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