지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
Heterogeneous semiconductor composites have been widely used to establish high-performance microelectronic or optoelectronic devices. During a deposition of silicon atoms on silicon/germanium compound surfaces, germanium (Ge) atoms are segregated from the substrate to the surface and are mixed in incoming a silicon layer. To suppress Ge segregation to obtain the interface sharpness between silicon layers and silicon/germanium composite layers, approaches have used silicon hydride gas species. The hydrogen atoms can play a role of inhibitors of silicon/germanium exchange. However, there are few kinetic models to explain the hydrogen effects. We propose using segregation probability which is affected by hydrogen atoms covering substrate surfaces. We derived the model to predict the segregation probability as well as the profile of Ge fraction through layers by using chemical reactions during silicon deposition.
목차
등록된 정보가 없습니다.
참고문헌 (0)
참고문헌 신청함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Substrate Temperature Dependence of Microcrystalline Silicon Thin Films by Combinatorial CVD Deposition
한국표면공학회지
2015 .06
-
[GE의 혁신 DNA (9편)] GE의 디지털 혁신에서 무엇을 배울 것인가?
자동화기술
2022 .11
-
[THEME SERIES]「GE의 혁신 DNA」 (2편) : GE의 디지털 혁신을 어떻게 바라볼 것인가?
자동화기술
2022 .04
-
4차 산업혁명과 GE
기계저널
2018 .05
-
Silicon-Hydrogen Bonding Configuration Modified by Layer Stacking Sequence in Silicon Heterojunction Solar Cells
AFORE
2022 .09
-
[THEME SERIES] 「GE의 혁신 DNA」 (7편) _ 비즈니스 모델을 바꾸고 있는 GE
자동화기술
2022 .09
-
Unlocking direct observation of hydrogen atoms in steels
대한용접학회 특별강연 및 학술발표대회 개요집
2024 .10
-
Strained Ge Light Emitter with Ge on Dual Insulators for Improved Thermal Conduction and Optical Insulation
IEIE Transactions on Smart Processing & Computing
2015 .10
-
게르마늄 응축 공정 모델링과 소자 응용
대한전자공학회 학술대회
2015 .11
-
[THEME SERIES] 「GE의 혁신 DNA」 (6편) _ 디지털 시대에 맞게 일하는 방식을 바꾼 GE
자동화기술
2022 .08
-
Polymer Brush Grafting by Surface Segregation of Cyclic Polymer Additives and Surface-Initiated Atom Transfer Radical Polymerization (SI-ATRP)
한국고분자학회 학술대회 연구논문 초록집
2022 .10
-
Optimization of Surface Properties of c-Si Solar Cells Using a SiOx Buffer Layer
AFORE
2024 .11
-
Si CMOS Extension and Ge Technology Perspectives Forecast Through Metal-oxide- semiconductor Junctionless Field-effect Transistor
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2016 .12
-
[GE의 혁신 DNA (8편)] GE의 브릴리언트 팩토리와 패스웍스
자동화기술
2022 .10
-
Investigation of Photoluminescence and Annealing Effect of PS Layers
한국재료학회지
2018 .01
-
DEPOSITION OF WIDE BANDGAP SILICON ALLOY FILMS FOR THIN-FILM SILICON SOLAR CELLS BY CONTROLLING CARBON RATIO
AFORE
2015 .11
-
Current Status of Thin Film Silicon Solar Cells for High Efficiency
Current Photovoltaic Research
2017 .12
-
[THEME SERIES] 「GE의 혁신 DNA」 (5편) : GE는 왜 디지털 트랜스포메이션에 주목하는가? 외
자동화기술
2022 .07
-
Effect of a SiO₂ Anti-reflection Layer on the Optoelectronic Properties of Germanium Metal-semiconductor-metal Photodetectors
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2017 .08
이 논문의 저자 정보
최근 본 자료
댓글(0)
0