Direct Deposition of Polycrystalline Silicon Films on Plastic Substrates by Catalytic CVD for Thin Film Transistors

Chul-Lae Cho ,  Tae-Hwan Kim ,  Kyung-Min Lee 외 1명

한국진공학회 학술발표회초록집

2007 .02

Direct Deposition of microcrystalline Si Films at Low Temperatures (＜200 ℃) by Catalytic CVD

Tae-Hwan Kim ,  Kyung-Min Lee ,  Sunghwan Won 외 4명

한국진공학회 학술발표회초록집

2008 .02

The Thin Silicon Films Prepared by Thermal - and Photo - CVD at Low Temperatures

Chan-Hwa CHUNG ,  Jae Hyun HAN ,  Sang Heup MOON

한국진공학회 학술발표회초록집

1993 .07

Generation of Charged Silicon Nanoparticles and their Deposition into Crystalline Films using DC-Biased Substrate in Silane ICP-CVD Process

Seung-Wan Yoo ,  Shin-Jae You ,  Hee-Jung Yeom 외 3명

한국진공학회 학술발표회초록집

2017 .08

화학기상증착법(CVD)을 이용한 진공 박막 공정기술

홍완식

진공이야기

2014 .09

Fabrication of self-aligned thin film transistor with an ultra low temperature polycrystalline silicon process on stainless steel foil substrate

Jaehyun Moon ,  Dong-Jin Pa ,  k 외 7명

한국진공학회 학술발표회초록집

2006 .02

Plasmonic Enhanced Light Absorption by Silver Nanoparticles Formed on Both Front and Rear Surface of Polycrystalline Silicon Thin Film Solar Cells

Jongsung Pa ,  k ,  Nochang Pa 외 4명

한국진공학회 학술발표회초록집

2014 .02

The effect of electrical stress on the leakage current of polycrystalline silicon transistors

Jin-Wook Jeong ,  Jae-Hong Kwon ,  Sang-Il Shin 외 2명

한국진공학회 학술발표회초록집

2008 .02

Expanding Thermal Plasma CVD of Silicon Thin Films and Nano-Crystals : Fundamental Studies and Applications

Richa ,  d van de Sanden

한국진공학회 학술발표회초록집

2012 .08

Field emission property of CNT films manufactured by thermal CVD method on different types of substrate

이준석 ,  조이갑 ,  강동한 외 7명

한국진공학회 학술발표회초록집

2004 .08

Growth of SiO₂ Films on Flexible Plastic Substrate

Ji-bong Ryu ,  Chang-kwon Hwangbo

한국진공학회 학술발표회초록집

2002 .06

Reverse annealing of boron doped polycrystalline silicon

Won-Eui Hong ,  Jae-Sang Ro

한국진공학회 학술발표회초록집

2010 .02

Reverse annealing of boron doped polycrystalline silicon

임정윤 ,  노재상

한국진공학회 학술발표회초록집

2009 .02

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Solid - phase crystallization of amorphous silicon films deposited by plasma - enhanced chemical vapor deposition

Jung-Keun Lee

Journal of Korean Vacuum Science & Technology

1998 .04

Study on the substrate effect in chemical vapor deposition of graphene

Jungtae Nam ,  Dong-Chul Kim ,  Dong Yun Lee 외 3명

한국진공학회 학술발표회초록집

2017 .08

Controlled Growth of Large-area Mono-, Bi-, and Few-layer Graphene by Chemical Vapor Deposition on Copper Substrate

Yooseok Kim ,  Su-il Lee ,  Dae Sung Jung 외 6명

한국진공학회 학술발표회초록집

2014 .02

CVD에 의한 Ta₂O5 박막의 성장및 물성 분석

김선우 ,  김형준

한국진공학회 학술발표회초록집

1991 .07

Chemical Vapor Deposition of Ga₂O₃ Thin Films on Si Substrates

Doo Hyun Kim ,  Seung Ho Yoo ,  Ki-Seok An 외 3명

한국진공학회 학술발표회초록집

2001 .02

Synthesis of large grain MoS2 films by control of vertical distance from source to substrate during chemical vapor deposition

Sung Jae Pa ,  k ,  Sang Woo Pak 외 1명

한국진공학회 학술발표회초록집

2017 .02