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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.28 No.4
- 발행연도
- 2019.7
- 수록면
- 88 - 92 (5page)
- DOI
- 10.5757/ASCT.2019.28.4.88
이용수
초록· 키워드
오류제보하기
Because radio frequency (RF) sensors typically experience interference between their capacitive detector and inductive detector, it becomes difficult for them to precisely measure voltage and current waveforms. We developed a high-precision RF sensor by using novel double walls (NDWs), which can minimize the interference. The geometrical construction variables of the NDWs are determined by analyzing the results from three-dimensional electro-magnetic simulation. The phase difference between voltage and current waveforms for the designed RF sensor is approximately 1.32° at a matched load, and that for an ENI probe (VIP1004) is 24.78°, as a result of which the developed RF sensor has better performance in preventing such interferences, compared with the other commercial sensor.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experimental details
Ⅲ. Results and discussion
Ⅳ. Supplementary Study
Ⅴ. Conclusions
References
참고문헌 (11)
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UCI(KEPA) : I410-ECN-0101-2019-420-001277642