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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.4
- 발행연도
- 2017.7
- 수록면
- 74 - 78 (5page)
이용수
초록· 키워드
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The discharge characteristics of the radio frequency (RF) surface dielectric barrier discharge have been simulated for the investigation of the ratio of the ion transit time to the RF period. From one-dimensional particle-incell (PIC) simulation for a planar dielectric barrier discharge (DBD), it was observed that the high-frequency driving voltage confines the ions in the plasma because of a shorter RF period than the ion transit time. For two-dimensional surface dielectric barrier discharges, a fluid simulation is performed to investigate the characteristics of RF discharges from 1MHz to 40 MHz. The ratio of the peak density to the average density decreases with the increasing frequency, and the spatiotemporal discharge patterns change abruptly with the change in the ratio of ion transit time to the RF period.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Simulation Conditions
Ⅲ. Results
Ⅳ. Conclusions
References
참고문헌 (12)
참고문헌 신청
H. W. Lee, G. Y. Park, Y. S. Seo, Y. H. Im, S. B. Shim, and H. J. Lee, J. Phys. D: Appl. Phys. 44, 053001 (2011).
B. Eliasson, M. Hirth, and U. Kogelschatz, J. Phys. D: Appl. Phys. 20, 1421 (1987).
J. G. Eden and S. J. Park, Plasma Phys. Control. Fusion 47, B83 (2005).
D. S. Lee, K. Tachibana, H. J. Yoon, and H. J. Lee, Jpn. J. Appl. Phys. 48, 056003 (2009).
J. Pons, E. Moreau, and G. Touchard, J. Phys. D: Appl. Phys. 38, 3635 (2005).
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