지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Journal of Korean Vacuum Science & Technology Journal of Korean Vacuum Science & Technology Vol.4 No.2
- 발행연도
- 2000.6
- 수록면
- 50 - 54 (5page)
이용수
초록· 키워드
오류제보하기
We studied the synthesis of Si_(1-x)C_x (x = 0.016) epitaxial layer using ion implantation and solid phase epitaxy (SPE). The activation energy E_a was obtained for the loss of substitutional carbon using fourier transform-infrared spectroscopy (FTIR) and high-resolution x-ray diffraction (HR-XRD). In FTIR analysis, the integrated peak intensity was used to quantify the loss of carbon atoms from substitutional to interstitial sites during annealing. The substitutional carbon contents in Si_(0.984)C_(0.016) were also measured using HR-XRD. By dynamic simulations of x-ray rocking curves, the fraction of substitutional carbon was obtained. The effects of annealing temperature and time were also studied by comparing vacuum furnace annealing with rapid thermal annealing (RTA).
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experimental Details
Ⅲ. Results and Discussion
Ⅳ. Conclusions
Acknowledgement
References
참고문헌 (0)
참고문헌 신청함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Effect of rapid thermal annealing (RTA) on structural properties of carbon nanotubes
한국진공학회 학술발표회초록집
2007 .02
-
Step Annealing Effects on Be-doped GaAs layer grown by Molecular Beam Epitaxy
한국진공학회 학술발표회초록집
2007 .08
-
First-principles study on substitutional effects on magnetism in bee Fe
한국자기학회 학술연구발표회 논문개요집
2008 .06
-
Electronic and optical property of MoSe₂ with substitutional doping
한국진공학회 학술발표회초록집
2016 .08
-
Growth of Graphene Films from Solid-state Carbon Sources
한국진공학회 학술발표회초록집
2014 .02
-
Temperature dependent magnetic properties of Bi-doped Fe16N₂ for potential rare-earth-free permanent magnet applications
한국자기학회 학술연구발표회 논문개요집
2019 .05
-
Si+이온주입에 의한 비정질씰리콘의 고상 Epitaxy에 관한 연구
한국진공학회 학술발표회초록집
1995 .02
-
Characterization of Cu2+ Impurity Ion in K₂SnCl6:Cu Single Crystal
Journal of Magnetics
2018 .06
-
Set voltage improvement of resistive switching in MnOx using oxygen annealing
한국진공학회 학술발표회초록집
2008 .08
-
A Novel Solid Phase Epitaxy Emitter for Silicon Solar Cells
한국진공학회 학술발표회초록집
2014 .02
-
Annealing effects of aluminium silicate films grown on Si(100)
한국진공학회 학술발표회초록집
2001 .07
-
Synthesis of Carbon Nanotubes by Annealing in the H₂ Atmosphere
한국진공학회 학술발표회초록집
2004 .08
-
Formation of TiSi₂ on the n-type <100> Si by Rapid Thermal Annealing
한국진공학회 학술발표회초록집
1995 .06
-
Comparative Study of Thermal Annealing and Microwave Annealing in a-InGaZnO Used to Pseudo MOSFET
한국진공학회 학술발표회초록집
2013 .08
-
Study on the Phosphorus Dopant Activation by Annealing Method
한국진공학회 학술발표회초록집
2015 .02
-
Thermal annealing effect on field emission properties of double-walled carbon nanotubes
한국진공학회 학술발표회초록집
2006 .08
-
Room-temperature Ferromagnetism in Tetragonal Mn2-xCrxAs Film Grown by Molecular-beam Epitaxy
한국자기학회 학술연구발표회 논문개요집
2008 .12
-
Growth of YIG films by solid phase epitaxy and their properties
한국자기학회 학술연구발표회 논문개요집
2003 .12
-
n-GaAs 구조에서의 ArF excimer laser annealing에 따른 Photoreflectance 특성 연구
Applied Science and Convergence Technology
2007 .03
-
Behavior of Plasma-doped Graphene upon High Temperature Vacuum Annealing
Applied Science and Convergence Technology
2018 .09
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2019-420-001259584