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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.24 No.2
- 발행연도
- 2015.3
- 수록면
- 41 - 46 (6page)
이용수
초록· 키워드
오류제보하기
Transparent conductive oxides (TCOs) are essential material in optoelectronics such as solar cells, touch screens and light emitting diodes. Particularly TCOs are attractive material for infrared cut off film due to their high transparency in the visible wavelength range and high infrared reflectivity. Among the TCO, Indium tin oxide has been widely used because of the high electrical conductivity and transparency in the visible wavelength region. But ITO has several limitations; expensive and low environmental stability. On the other hands, fluorine doped tin oxide (FTO) is well known for low cost, weather ability and stable in acidic and hydrogen. In this study, two different magnetron sputtering techniques with RF and DC modes at room temperature deposition of FTO thin film was conducted. The change of oxygen content is influence on the topography, transmittance and refractive index.
목차
I. Introduction
II. Experiments and Discussion
III. Sumarry
References
참고문헌 (18)
참고문헌 신청
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2. [학술지(정기간행물)] - E. Fortunato / 2007 / / MRS Bull 32 : 242 ~
3. [학술지(정기간행물)] - B. Zhang / 2011 / / Optoelectronics and advanced materials−rapid communications 4 : 1158 ~
4. [학술지(정기간행물)] - Z. M. Jarzebski / 1976 / / J. Electrochem. Soc 123 : 199C ~
5. [학술지(정기간행물)] - K. S. Ramaih / 2006 / / Appl. Sur. Sci 253 : 1451 ~
2. [학술지(정기간행물)] - E. Fortunato / 2007 / / MRS Bull 32 : 242 ~
3. [학술지(정기간행물)] - B. Zhang / 2011 / / Optoelectronics and advanced materials−rapid communications 4 : 1158 ~
4. [학술지(정기간행물)] - Z. M. Jarzebski / 1976 / / J. Electrochem. Soc 123 : 199C ~
5. [학술지(정기간행물)] - K. S. Ramaih / 2006 / / Appl. Sur. Sci 253 : 1451 ~
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UCI(KEPA) : I410-ECN-0101-2019-420-001275451