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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제7권 제6호
- 발행연도
- 2006.1
- 수록면
- 297 - 300 (4page)
이용수
초록· 키워드
오류제보하기
The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. This modeling is used to analyze the variation of the pretilt angle under various process conditions. IB exposure angle and IB exposure time are considered as input factors. The analysis of variance technique is settled to analyze the statistical significance, and effect plots are also investigated to examine the relationships between the process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.
목차
등록된 정보가 없습니다.
참고문헌 (9)
참고문헌 신청
/ 1976. / The analysis and selection of variables in linear regression 32 : 1 ~
/ 1994. / Enhancing the analysis of variance technique with graphical analysis and its application to wafer processing equipment a 17 (va) : 149 ~
/ 1999. / Invesitgation of surface anchoring strength and pretilt angle in NLC on rubbed polythiophene surface with alkyl chain lengths 26 : 1621 ~
/ 2000. / Pretilt angles of vertically aligned nematic liquid crystal with the application of copolymers possessing chalconyl and cholesteryl moiety 39 : 1108 ~
/ 2001 / Pretilt angle generation by UV exposure during imidization of polyimide 28 : 2001 ~
/ 1994. / Enhancing the analysis of variance technique with graphical analysis and its application to wafer processing equipment a 17 (va) : 149 ~
/ 1999. / Invesitgation of surface anchoring strength and pretilt angle in NLC on rubbed polythiophene surface with alkyl chain lengths 26 : 1621 ~
/ 2000. / Pretilt angles of vertically aligned nematic liquid crystal with the application of copolymers possessing chalconyl and cholesteryl moiety 39 : 1108 ~
/ 2001 / Pretilt angle generation by UV exposure during imidization of polyimide 28 : 2001 ~
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