Hafnium oxide thin films by atomic layer deposition using a novel Hf metallorganic precursor

Seungmin Yeo ,  Ga Yeon Lee ,  Taeyong Eom 외 6명

한국진공학회 학술발표회초록집

2020 .08

Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride

Luchana L. YUSUP ,  Jae-Min PARK ,  Ti 외 5명

한국진공학회 학술발표회초록집

2016 .08

Atomic Layer deposition를 이용한 MoOx 박막 증착의 두께 변화 관찰

정민지

한국진공학회 학술발표회초록집

2018 .02

The Study of interface of In₂O₃ grown by atomic layer deposition (ALD) using Et₂InN(TMS)₂ as In precursor on Si(100)

Young Joon CHO ,  Hyo Sik CHANG

한국진공학회 학술발표회초록집

2016 .08

Atomic Layer Deposited Metal Thin Films on T-shirts

Han-Bo-Ram Lee

한국진공학회 학술발표회초록집

2017 .08

Precise control of electronic properties of graphene using n-doping method via atomic layer deposition

박진선 ,  성명모

한국진공학회 학술발표회초록집

2017 .02

Application of Atomic Layer Deposition to Solid Oxide Fuel Cells Based on Nanoscale Electrode Modification

Jiwon Oh ,  Heesu Hwang ,  Seungmuk Bae 외 1명

한국진공학회 학술발표회초록집

2018 .08

The effect of back electrode on electric properties of SnS thin film using atomic layer deposition

Hu weiguang ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2018 .02

Synthesis and Characterization of SnO2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition Using SnCl4 Precursor and Oxygen Plasma

이동권 ,  김다영 ,  권세훈

한국진공학회 학술발표회초록집

2016 .02

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Fabrication and Characterization of Organic-Inorganic Hybrid Thin Films

C.T.T.Huong ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .02

Controlled growth of atomic layer deposited Molybdenum based thin film using a novel nitrogen and sulfur containing precursor

Yujin JANG ,  Mi ,  ang BYEON 외 3명

한국진공학회 학술발표회초록집

2016 .08

Layer-by-layer deposition of chemical-vapor-deposition-grown graphenes

Daeyoon KIM ,  Jeong Kyun NOH ,  Jae-Hee HAN

한국진공학회 학술발표회초록집

2016 .08

The diagnosis of Al₂O₃ atomic layer deposition using quadrupole mass spectrometry and characterization

Go ,  u KANG ,  Jin-Tae KIM 외 4명

한국진공학회 학술발표회초록집

2016 .08

Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

ALD(Atomic Layer Deposition)를 이용한 전하선택접촉박막MoOx의 패시베이션 특성 및 HIT cell 적용

정민지 ,  장효식

한국진공학회 학술발표회초록집

2020 .08

CO oxidation catalyzed by NiO/mesoporous Al₂O₃

Sang Wook Han ,  Dae Han Kim ,  Eun Ji Pa 외 6명

한국진공학회 학술발표회초록집

2015 .02

Wafer scale well-connected CVD-grown graphene grains by using selective atomic layer deposition of ZnO

Nguyen Van Long ,  Sung Myung Mo

한국진공학회 학술발표회초록집

2017 .02

Fabrication of Organic-Inorganic Hybrid Encapsulation Layer by Atomic Layer Deposition and Molecular Layer Deposition

HongBum Kim ,  Myung.Mo Sung

한국진공학회 학술발표회초록집

2015 .02

Surface passivation by atomic layer deposited Al₂O₃

SHUXIN WANG ,  Kang-Hun Jo ,  Hyung Sang Pa 외 2명

한국진공학회 학술발표회초록집

2019 .08