Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구

탁현우 ,  문룡 ,  성다인 외 3명

한국진공학회 학술발표회초록집

2020 .02

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Effect of hybrid plasma source on O radical generation in oxygen plasma

Kwan-Yong Kim ,  Kyung-Hyun Kim ,  Young-Hun Hong 외 2명

한국진공학회 학술발표회초록집

2018 .08

Microwave Plasma Source Optimization for Thin Film Deposition Applications

Mahmoud A. I. Elga ,  hy

Applied Science and Convergence Technology

2022 .03

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma

Jonggu Han ,  Rodolphe Mauchauffé ,  Se Youn Moon

Applied Science and Convergence Technology

2023 .09

Flexible Plasma Sheets

Guangsup Cho ,  Yunjung Kim

Applied Science and Convergence Technology

2018 .03

Plasma Properties Data Center Activities for Plasma Application in the National Fusion Research Institute

송미영 ,  김대철 ,  권득철 외 16명

한국진공학회 학술발표회초록집

2019 .08

Energy deposition modeling and design of plasmas processes for synthesis of nano-structured film materials

Jeon G. HAN ,  Bibhuti B. SAHU ,  Manish KUMAR 외 1명

한국진공학회 학술발표회초록집

2016 .08

Enhanced Anti-reflective Effect of SiN_x/SiO_x/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source

Min-Jun Choi ,  O Dae Kwon ,  Sang Dae Choi 외 3명

Applied Science and Convergence Technology

2016 .07

Enhancement of the Virtual Metrology Performance for Plasma-assisted Processes by Using Plasma Information (PI) Parameters

Seolhye Pa ,  k ,  Juyoung Lee 외 5명

한국진공학회 학술발표회초록집

2015 .08

마이크로스트립 라인을 이용한 마이크로웨이브 플라즈마 기술 및 응용

김재호

진공이야기

2020 .09

Plasma Farming : Comprehensive Plasma Application to Agriculture

Suk Jae Yoo

한국진공학회 학술발표회초록집

2017 .08

Challenges and Solution on Large Scale of Atmospheric Pressure Plasma for Environmental Plasma Applications

Due Ba Nguyen ,  Nosi ,  Matyakubov 외 3명

한국진공학회 학술발표회초록집

2020 .08

Plasma enhanced atomic layer deposition of silicon nitride films using a VHF (162 ㎒) multi-tile push-pull plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .08

Inductively Coupled Plasma 장치에서 Hybrid Plasma Model을 활용한 C₂F₈/ O₂ 가스의 특성 해석

김환호 ,  이정열 ,  박희성 외 2명

한국진공학회 학술발표회초록집

2019 .08

Plasma deposition of functional nanocomposites

F ,  anz FAUPEL ,  Thomas STRUNSKUS 외 5명

한국진공학회 학술발표회초록집

2016 .08

Atomic Layer Deposited Metal Thin Films on T-shirts

Han-Bo-Ram Lee

한국진공학회 학술발표회초록집

2017 .08