Characterization of inductively coupled Ar/CH4 plasma using tuned single langmuir probe and fluid simulation

차주홍 ,  한문기 ,  김동현 외 2명

한국진공학회 학술발표회초록집

2015 .08

Diagnostics and modeling of inductively coupled methane plasma using the electrostatic probe and plasma simulations

차주홍 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

Effects of pulse modulation in Ar/H₂ inductively coupled plasma using fluid simulation

서권상 ,  김동현 ,  이호준

한국진공학회 학술발표회초록집

2017 .08

Charterization of large-area N₂/NH₃/SiH₄ inductively coupled plasma using fluid simulation

서권상 ,  김동현 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .11

Pulsed Inductively Coupled Plasma Discharge Simulation for Semiconductor Processing in 2D Axisymmetric Structure

Yejin Shon ,  So ,  a Lee 외 3명

Applied Science and Convergence Technology

2020 .11

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Interannual Variability of Atmospheric CH₄ and Its Driver Over South Korea Captured by Integrated Data in 2019

Samuel Takele Kenea ,  Haeyoung Lee ,  Sangwon Joo 외 4명

한국기상학회 학술대회 논문집

2021 .10

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH₄ Microwave Plasma

Moon-Ki Han ,  Taehwan Kim ,  Ju-Hong Cha 외 3명

Applied Science and Convergence Technology

2017 .03

Oxide 및 Nitride 고선택비 식각 공정에서의 CF4(CHF3)/O2/Ar inductively coupled pulsed plasmas

김희주 ,  신예지 ,  김교운 외 4명

한국진공학회 학술발표회초록집

2020 .02

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

Effects of Chamber Wall Contamination Levels on Plasma Properties in Long-Term C₄F₈/Ar Plasma Deposition Processes

Woojin Pa ,  k ,  Sangjun Pa 외 2명

Applied Science and Convergence Technology

2024 .11

Inductively Coupled Plasma Discharge Simulation for the Semiconductor Process Considering Impedance Calculation in 3D Asymmetric Structure

Yejin Shon ,  So ,  a Lee 외 3명

Applied Science and Convergence Technology

2020 .03

Modified Fluid Simulation of an Inductively Coupled Plasma Discharge

Dong-gil Kim ,  YoungDo Jeong ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2019 .11

Inductively Coupled Plasma 장치에서 Hybrid Plasma Model을 활용한 C₂F₈/ O₂ 가스의 특성 해석

김환호 ,  이정열 ,  박희성 외 2명

한국진공학회 학술발표회초록집

2019 .08

Quantitative analysis of silicone fluid by inductively coupled plasma-optical emission spectroscopy

Mi ,  i ,  Kwon

한국분석과학회 학술대회

2016 .11

Experimental investigation on the plasma generation efficiency and plasma parameters in inductively coupled plasmas with a serial and a parallel antenna

김태우 ,  강현주 ,  정진욱

한국진공학회 학술발표회초록집

2017 .08

Research on parallelization mechanism of inductively coupled plasma for large area plasma source

이장재 ,  김시준 ,  김광기 외 5명

한국진공학회 학술발표회초록집

2016 .02

Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System

Ju-Ho Kim ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2020 .08