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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.2
- 발행연도
- 2017.3
- 수록면
- 34 - 41 (8page)
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초록· 키워드
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A 2.45 GHz microwave plasma with linear antenna has been prepared for hydrophobic and wear-resistible surface coating of carbon steel. Wear-resistible properties are required for the surface protection of cutting tools and achieved by depositing a hydrogenated amorphous carbon film on steel surface through linear microwave plasma source that has TE<SUB>10-</SUB>TEM waveguide. Compared to the existing RF plasma source driven by 13.56MHz, linear microwave plasma source can easily generate high density plasma and provide faster deposition rate and wider process windows. In this study, Ar/CH₄ gas mixtures are used for hydrogenated amorphous carbon film deposition. When microwave power of 1000W is applied, 40 cm long uniform Ar/CH₄ plasma could be obtained in gas pressure of 200~400 mTorr. The Vickers hardness measurement of hydrogenated amorphous carbon film on steel surface was evaluated. It was found the optimized deposition condition at Ar : CH₄=25:25 sccm, 300 mTorr with microwave power of 1000W and RF bias power of 100W. By deposition of hydrogenated amorphous carbon film, contact angle on steel surfaces increases from 43.9° to 93.2°.
목차
Abstract
I. Introduction
II. Materials and Methods
III. Results and Discussion
IV. Conclusions
References
참고문헌 (25)
참고문헌 신청
Li QIANG, Bin ZHANG, Kaixiong GAO, Zhenbin GONG, Junyan ZHANG, Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films, Friction 1(4): 350?358 (2013).
Somna S. Mahajan, H. C. Barshilia, B. R. Mehta, and V. D. Vankar, “On the determination of the sp3 to sp2 ratio in diamond-like carbon thin Films”, Thin Solid Films 302 (1997), 250-255.
J.C. Lascovich, R. Giorgi and S. Scaglione, “Evaluation of the sp2/ sp3 ratio in amorphous carbon structure by XPS and XAES”, Applied Surface Science 47 (1991), 17-21.
Young-Ho Son, Woo-Chul Jung and Jae-In Jeong , “FTIR Characteristics of Hydrogenated Amorphous Carbon Films Prepared by ECR-PECVD”, Journal of the Korean Physical Society, Vol. 39, No. 4, October 2001, pp. 713-717.
Ilhyun Jung, “Deposition of Amorphous Carbon Layer by PECVD”, J. Korean Ind. Eng. Chem., Vol. 19, No. 3, June 2008, 322-325.
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UCI(KEPA) : I410-ECN-0101-2019-420-001276423