지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 Journal of Electrical Engineering & Technology Journal of Electrical Engineering & Technology Vol.10 No.3
- 발행연도
- 2015.5
- 수록면
- 1,138 - 1,143 (6page)
이용수
초록· 키워드
오류제보하기
Effects of fabrication process variations on impedance of microelectrodes integrated on a neural probe were examined through equivalent circuit modeling and SPICE simulation. Process variation and the corresponding range were estimated based on experimental data. The modeling results illustrate that the process variation induced by metal etching process was the dominant factor in impedance variation. We also demonstrate that the effect of process variation is frequency dependent. Another process variation that was examined in this work was the thickness variation induced by deposition process. The modeling results indicate that the effect of thickness variation on impedance is negligible. This work provides a means to predict the variations in impedance values of microelectrodes on neural probe due to different process variations.
목차
Abstract
1. Introduction
2. Structure and Equivalent Circuit Model
3. Results and Discussion
4. Conclusions
References
참고문헌 (12)
참고문헌 신청
1. [학술지(정기간행물)] - R. Bhandari / 2008 / A novel method of fabricating convoluted shaped electrode arrays for neural and retinal prostheses / Sensors and Actuators : A Physical 145 : 123 ~ 130
2. [학술지(정기간행물)] - Taikyeong Ted. Jeong / 2014 / Specialized Sensors and System Modeling for Safety-critical Application / Journal of Electrical Engineering & Technology 9 (3) : 950 ~ 956
3. [학술지(정기간행물)] - Seung-Ki Hong / 2014 / Optimal Design of a Novel Permanent Magnetic Actuator using Evolutionary Strategy Algorithm and Kriging Meta-model / Journal of Electrical Engineering & Technology 9 (2) : 471 ~ 477
4. [학술지(정기간행물)] - B. Ziaie / 2004 / Hard and soft micromachining for BioMEMS : review of techniques and examples of applications in microfluidics and drug delivery / Advanced Drug Delivery Reviews 56 : 145 ~ 172
5. [학술지(정기간행물)] - J. Du / 2009 / Dualside and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates / Journal of Micromechanics and Microengineering 9 : 075008 ~
2. [학술지(정기간행물)] - Taikyeong Ted. Jeong / 2014 / Specialized Sensors and System Modeling for Safety-critical Application / Journal of Electrical Engineering & Technology 9 (3) : 950 ~ 956
3. [학술지(정기간행물)] - Seung-Ki Hong / 2014 / Optimal Design of a Novel Permanent Magnetic Actuator using Evolutionary Strategy Algorithm and Kriging Meta-model / Journal of Electrical Engineering & Technology 9 (2) : 471 ~ 477
4. [학술지(정기간행물)] - B. Ziaie / 2004 / Hard and soft micromachining for BioMEMS : review of techniques and examples of applications in microfluidics and drug delivery / Advanced Drug Delivery Reviews 56 : 145 ~ 172
5. [학술지(정기간행물)] - J. Du / 2009 / Dualside and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates / Journal of Micromechanics and Microengineering 9 : 075008 ~
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Machine Learning Based Variation Modeling and Optimization for 3D ICs
Journal of information and communication convergence engineering
2016 .12
-
New Perspectives on Impedance Control
대한기계학회 춘추학술대회
2024 .11
-
Temperature effect on wireless impedance monitoring in tendon anchorage of prestressed concrete girder
Smart structures and systems
2015 .01
-
Detection of pH variation using 2D sensing structure
대한전자공학회 학술대회
2019 .06
-
Industry 4.0 - A challenge for variation simulation tools for mechanical assemblies
Advances in computational design
2019 .01
-
Extended Fault Location Algorithm Using the Estimated Remote Source Impedance for Parallel Transmission Lines
Journal of Electrical Engineering & Technology
2018 .11
-
Advances and challenges in impedance-based structural health monitoring
Structural monitoring and maintenance
2017 .01
-
PQ변동을 이용한 개선된 계통 임피던스 추정기법
전력전자학회논문지
2015 .04
-
A method for in-situ measurement of grid impedance and load impedance at 2 k – 150 kHz
ICPE(ISPE)논문집
2015 .06
-
3 차원 신경망 매핑을 위한 수직정렬된 탄소나노튜브가 통합된 낮은 임피던스를 갖는 뉴럴프로브 개발
한국정밀공학회 학술발표대회 논문집
2022 .10
-
수소전기차 연료전지 수명 향상을 위한 부하 변동 제거 및 스택 내구성 실험
한국수소및신에너지학회논문집
2024 .08
-
Study on the thickness variation after the swaging process with various process parameters
한국소성가공학회 학술대회 논문집
2016 .04
-
Simulation on Sensing Ability of Sense Amplifier with Process Variation
대한전자공학회 학술대회
2019 .06
-
A Bandgap Reference Circuit with Feedback Loop for Decrement of Effects from PVT Variations
전자공학회논문지
2023 .02
-
접지 그리드에서의 보조전극 배치에 따른 접지임피던스 측정 및 분석
한국안전학회지
2015 .01
-
Study on the thickness variation after the swaging process with respect to the variation of tube diameter and thickness
한국소성가공학회 학술대회 논문집
2015 .10
-
임피던스 기반 Li₄Ti₅O12 배터리의 전기적 특성 분석
대한전기학회 학술대회 논문집
2017 .04
-
Cost-Efficient and Automatic Large Volume Data Acquisition Method for On-Chip Random Process Variation Measurement
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2015 .04
-
Electrical impedance-based crack detection of SFRC under varying environmental conditions
Smart structures and systems
2018 .01
-
Variations in Relevance Vector Machine Regression
대한산업공학회 추계학술대회 논문집
2017 .11
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2016-560-001331291