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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 Journal of Electrical Engineering & Technology Journal of Electrical Engineering & Technology Vol.9 No.1
- 발행연도
- 2014.1
- 수록면
- 307 - 312 (6page)
이용수
초록· 키워드
오류제보하기
We present a full finite element analysis for plasma discharge in etching process of semiconductor circuit. The charge transport equations of hydrodynamic diffusion-drift model and the electric field equation were numerically solved in a fully coupled system by using a standard finite element procedure for transient analysis. The proposed method was applied to a real plasma reactor in order to characterize the plasma sheath that is closely related to the yield of the etching process. Throughout the plasma discharge analysis, the base electrode of reactor was tested and modified for improving the uniformity around the wafer edge. The experiment and numerical results were examined along with SEM data of etching quality. The feasibility and usefulness of the proposed method was shown by both numerical and experimental results.
목차
Abstract
1. Introduction
2. Analysis Model of Dry Etching Chamber
3. Hydrodynamic Diffusion-Drift Model for Discharge Process
4. Numerical and Experimental Results
5. Conclusion
References
참고문헌 (15)
참고문헌 신청
1. [학술지(정기간행물)] - Antonios Armaou / 2001 / Feedback control of plasma etching reactors for improved etching uniformity / Chemical Engineering Science 56 : 1467 ~ 1475
2. [학술지(정기간행물)] - R. Morrow / 1985 / Theory of negative corona in oxygen / Phys. Rev. A 32 (3) : 1799 ~ 1809
3. [학술지(정기간행물)] - G. Steinle / 1999 / Two-dimensional simulation of filaments in barrier discharges / J. Phys. D : Appl. Phys 32 : 1350 ~ 1356
4. [학술지(정기간행물)] - J. Paillol / 2002 / Negative corona in air at atmospheric pressure due to a voltage impulse / J. Appl. Phys 91 (9) : 5614 ~ 5621
5. [학술지(정기간행물)] - G. E. Georghiou / 2005 / Numerical modeling of atmospheric pressure gas discharges leading to plasma pro-duction / J. Phys. D: Phys. 38 : 308 ~ 328
2. [학술지(정기간행물)] - R. Morrow / 1985 / Theory of negative corona in oxygen / Phys. Rev. A 32 (3) : 1799 ~ 1809
3. [학술지(정기간행물)] - G. Steinle / 1999 / Two-dimensional simulation of filaments in barrier discharges / J. Phys. D : Appl. Phys 32 : 1350 ~ 1356
4. [학술지(정기간행물)] - J. Paillol / 2002 / Negative corona in air at atmospheric pressure due to a voltage impulse / J. Appl. Phys 91 (9) : 5614 ~ 5621
5. [학술지(정기간행물)] - G. E. Georghiou / 2005 / Numerical modeling of atmospheric pressure gas discharges leading to plasma pro-duction / J. Phys. D: Phys. 38 : 308 ~ 328
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UCI(KEPA) : I410-ECN-0101-2015-500-001072580