Characterization of CNx thin films by the gas effusion technique

Daeyoung Kim ,  Minseok Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2014 .08

Effect on the CNx molecular behavior in N₂ plasma during deposition of carbon nitride film by RF magnetron sputtering

노기민 ,  최시경 ,  김정형

한국진공학회 학술발표회초록집

2008 .02

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Synthesis of Graphene by Plasma Enhanced Chemical Vapor Deposition and Its transfer for Device Application

서동익 ,  한정윤 ,  김언정 외 1명

한국진공학회 학술발표회초록집

2010 .08

Plasma Enhanced Chemical Vapor Deposition 을 이용한 TiO₂ 박막의 증착 및 특성 연구

이원규 ,  우성일

한국진공학회 학술발표회초록집

1993 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Growth of carbon nanotubes on metal substrates using plasma - enhanced chemical vapor deposition

Se ,  ng-Ye ,  l Pa 외 9명

한국진공학회 학술발표회초록집

2002 .06

Inorganic Thin Film Passivation Layer Fabricated by Plasma Enhanced Chemical Vapor Deposition

Bum-Hee Lee ,  Dong-Hee Pa ,  k 외 3명

한국진공학회 학술발표회초록집

2013 .02

Mechanical properties of silicon nitride prepared by plasma enhanced chemical vapor deposition at low temperature as a function of dc bias voltage

Thuy T. T. Pham ,  J. H. Lee ,  I. K. Kim 외 1명

한국진공학회 학술발표회초록집

2007 .08

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

Development of an Improved Numerical Methodology for Design and Modification of Large Area Plasma Processing Chamber

김호준 ,  이승무 ,  원제형

한국진공학회 학술발표회초록집

2014 .02

The Study on Synthesis and Characterization of Various Functional Materials by Physical Vapor Deposition and Chemical Vapor Deposition method

송용화 ,  조상진 ,  정충경 외 1명

한국진공학회 학술발표회초록집

2006 .02

Effects of nitrogen introduced carbon nanotubes by using microwave plasma enhanced chemical vapor deposition

Yun Hee Kim ,  Ji Hoon Yang ,  Young Jin Lee 외 9명

한국진공학회 학술발표회초록집

2003 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Low temperature synthesis of carbon nanotubes using Plasma Enhanced Chemical Vapor Deposition(PECVD)

윤형주 ,  강호석 ,  홍진표 외 1명

한국진공학회 학술발표회초록집

2001 .02