Low Temperature PECVD for SiOx Thin Film Encapsulation

Hyung June Ahn ,  Sang Heon Yong ,  Sun Jung Kim 외 2명

한국진공학회 학술발표회초록집

2016 .02

Atmospheric Pressure Chemical Vapor Deposition을 이용한 SiOx 박막 형성

김가영 ,  박재범 ,  염근영

한국진공학회 학술발표회초록집

2012 .02

Characteristics of SiOx thin films deposited by atmospheric pressure chemical vapor deposition using a double discharge system

박재범 ,  길엘리 ,  염근영

한국진공학회 학술발표회초록집

2011 .02

Effect of SiF₄ addition on the structures of silicon films deposited at low temperature by remote plasma enhanced chemical vapor deposition

Xiaodong Li ,  Young-Bae Pa ,  k 외 2명

한국진공학회 학술발표회초록집

1995 .06

Oxidation Mechanism of Si in the Growth of SiOx Thin Film by Ion Beam Sputter Deposition

Kyung Joong Kim ,  Dae Won Moon ,  Moon-Seung Yang 외 2명

한국진공학회 학술발표회초록집

2003 .08

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

Cu film growth on Si substrate by combining plasma enhanced chemical vapor deposition with partially ionized beam deposition

K. H. Kim ,  S. C. Choi ,  D. J. Choi 외 5명

한국진공학회 학술발표회초록집

1997 .07

Growth of carbon nanotubes on metal substrates using plasma - enhanced chemical vapor deposition

Se ,  ng-Ye ,  l Pa 외 9명

한국진공학회 학술발표회초록집

2002 .06

High rate deposition and mechanical properties of SiOx film on PET and PC polymers by PECVD with the dual frequencies UHF and HF at low temperature

Su B. Jin ,  Yoon S. Choi ,  In S. Choi 외 1명

한국진공학회 학술발표회초록집

2010 .08

SiOx / (FePt, CoPt) / SiOx / Al 다층 박막의 극 Kerr 효과 수치해석

서동우 ,  박용우 ,  류호준 외 3명

한국자기학회 학술연구발표회 논문개요집

2003 .06

Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

Chemical Vapor Deposition of Ga₂O₃ Thin Films on Si Substrates

Doo Hyun Kim ,  Seung Ho Yoo ,  Ki-Seok An 외 3명

한국진공학회 학술발표회초록집

2001 .02

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

High energy-electron-beam induced modification of Aluminum and Titanium films on SiOx

이경재 ,  임규욱 ,  강태희 외 5명

한국진공학회 학술발표회초록집

2009 .02

Dissociation energy lowering of SiOx by Au

Kyoung-Jae Lee ,  Kyuwook Ihm ,  Mi-Hyun Yang 외 3명

한국진공학회 학술발표회초록집

2014 .08

Low temperature synthesis of carbon nanotubes using Plasma Enhanced Chemical Vapor Deposition(PECVD)

윤형주 ,  강호석 ,  홍진표 외 1명

한국진공학회 학술발표회초록집

2001 .02

Development of an Improved Numerical Methodology for Design and Modification of Large Area Plasma Processing Chamber

김호준 ,  이승무 ,  원제형

한국진공학회 학술발표회초록집

2014 .02

Microstructure and Properties of Er - SiOX Films Synthesized by Ion Beam Assisted Deposition

Gao Song Duan ,  Shu Qing Zheng ,  Xiao Juan Zhang 외 2명

Journal of Korean Vacuum Science & Technology

2002 .06

Optical emission spectroscopic study of reactive species during remote plasma - enhanced chemical vapor deposition of GaN

손철수 ,  윤의준

한국진공학회 학술발표회초록집

1997 .07