목차

1. INTRODUCTION 1
1.1 Background 1
1.2 Previous study based on the conventional method 3
1.2.1 Mechanical method of measuring adhesion 3
1.2.2 Conventional nondestructive method of measuring adhesion 6
1.2.3 Scanning acoustic microscopy for thin film characterization 9
1.2.4 Evaluation of adhesion using scanning acoustic microscopy 11
1.2.5 Ultrasonic atomic force microscopy 17
1.3 Research contents 18
2. EVALUATION OF ADHESIVE INTERFACE BY SCANNING ACOUSTIC MICROSCOPY 20
2.1 Introduction 20
2.2 Theoretical consideration 21
2.2.1 Imaging principal 21
2.2.2 Acoustic wave velocity measurement 24
2.2.3 Rayleigh wave 28
2.2.4 Reflectance function 32
2.2.5 Acoustic spectroscopy 38
2.2.6 Surface wave velocity measurement with V(z) curve method 41
2.2.7 Optimization of the measurement precision 44
2.3 Experimental details 45
2.3.1 Fabrication of the thin films by spin coating method 45
2.3.2 Experimental setup of scanning acoustic microscopy 49
2.3.3 The procedure of V(z) analysis 51
2.4 Experimental results 53
2.4.1 Optical microscopy image of the thin film surface 53
2.4.2 Thickness measurement by SEM 55
2.4.3 Measurement of surface wave velocity with V(z) method 69
2.5 Summary 65
3. VERIFICATION OF THE ADHESIVE INTERFACE BY NANO-SCRATCH TEST 66
3.1 Introduction 66
3.2 Theoretical consideration 68
3.2.1 Calculation of the work of adhesion by Laugier model 68
3.2.2 Calculation of the work of adhesion by Bull and Rickerby model 70
3.3 Experimental details 74
3.4 Experimental results 77
3.5 Summary 89
4. VISUALIZATION OF THE ADEHSIVE INTERFACE BY UAFM 90
4.1 Introduction 90
4.2 Theoretical consideration 91
4.3 Experimental details 96
4.3.1 Fabrication of the copper film system by physical vapor deposition 96
4.3.2 Fabrication of the polymeric films covered with SU-8 photo resist 98
4.3.3 Experimental setup 100
4.4 Experimental results 102
4.4.1 Measurement of the contact resonance frequency accordance with thin film thickness 102
4.4.2 Subsurface image of the thin film covered with SU-8 photo resist 104
4.4.3 Visualization of the adhesive interface 107
4.5 Summary 111
5. CONCLUSIONS 112
REFERENCE 114
Appendex A Weglein’s ray approach for V(z) curve 123
Appendex B Burtoni’s approach for V(z) curve 127