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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제19권 제6호
- 발행연도
- 2018.12
- 수록면
- 467 - 474 (8page)
- DOI
- https://doi.org/10.1007/s42341-018-0068-y
이용수
초록· 키워드
오류제보하기
This paper mainly reports a proper selection of beam material for the step structured based RF MEMS switch. Generally,the performance of the device purely depends upon beam material used for the RF switch. There is a wide range of materialsavailable for the beam layer which may change the performance of RF switch with their distinct material properties. Thoughvarious material selection methods are implemented earlier, among those methodologies Ashby’s material approach requiresminimum execution steps for the beam selection based on various geometrical and performance indices. There are mainlythree key performance indices like actuation voltage, S-parameters and residual stress by heat, are used to obtain the desiredperformance. The material selection in this work says that SU-8, PTFE followed by aluminum and gold are the more suitablematerials for beam material selection for Step structured RF-MEMS switch. Due to fabrication complexity, SU-8 andPTFE are not considered for the beam layer. After the investigation, the above given two material (i.e.) Gold and Aluminumare preferable for the beam, owing to its high cost gold is not much preferable material for the beam. Therefore, Aluminumis good for the beam layer.
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참고문헌 (16)
참고문헌 신청
R. J. Lee / 2014 / Military use of satellite communications, remote sensing, and global positioning systems in the war on terror / J. Air L. & Com 79(1):69~79
M. Bonthu / 2018 / An investigation of dielectric material selection of RF-MEMS switches using Ashby’s methodology for RF applications / Microsyst. Technol 24(4):1803~1809
N. Kolhare / 2015 / MEMS switches for 0.1–40 GHz for Pico-satellite application / Microsyst. Technol 21(4):707~717
M. Daneshmand / 2005 / Multiport MEMS-based waveguide and coaxial switches / IEEE Trans. Microw. Theory Tech 53(11):3531~3537
Daneshmand M / 2011 / RF MEMS satellite switch matrices / IEEE Microwave Magazine :02~109
M. Bonthu / 2018 / An investigation of dielectric material selection of RF-MEMS switches using Ashby’s methodology for RF applications / Microsyst. Technol 24(4):1803~1809
N. Kolhare / 2015 / MEMS switches for 0.1–40 GHz for Pico-satellite application / Microsyst. Technol 21(4):707~717
M. Daneshmand / 2005 / Multiport MEMS-based waveguide and coaxial switches / IEEE Trans. Microw. Theory Tech 53(11):3531~3537
Daneshmand M / 2011 / RF MEMS satellite switch matrices / IEEE Microwave Magazine :02~109
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