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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2020.8
- 수록면
- 345 - 352 (8page)
이용수
초록· 키워드
오류제보하기
We describe a calibration method to improve the accuracy of interferometric snapshot spectroscopic ellipsometry employing a dual-spectrometer sensor scheme. Conventional spectral wavelength calibration of a spectrometer has been performed by using a calibration lamp having multiple peaks at specific wavelength. This paper shows that such a conventional spectrometer calibration method is inappropriate for the proposed interferometric snapshot spectroscopic ellipsometry to obtain highly accurate ellipsometric phase information. And also, systematic error analysis of interferometric snapshot spectroscopic ellipsometry is conducted experimentally.
목차
Ⅰ. INTRODUCTION
Ⅱ. METHODOLOGY
Ⅲ. SPECTRAL CALIBRATION METHOD AND ERROR ANALYSIS
Ⅳ. EXPERIMENTS AND DISCUSSIONS
Ⅴ. CONCLUSION
REFERENCES
참고문헌 (22)
참고문헌 신청
K. Riedling / 1988 / Ellipsometry for Industrial Applications / Springer-Verlag
H. G. Tompkins / 1999 / Spectroscopic Ellipsometry and Reflectometry: A user’s Guide / Wiley
D. Aspnes / 2004 / Expanding horizons: new developments in ellipsometry and polarimetry / Thin Solid Films 455-456:3~13
A. Dejneka / 2009 / Spectroscopic ellipsometry applied to phase transitions in solids : possibilities and limitations / Opt. Express 17:14322~14338
J. W. Weber / 2010 / Optical constants of graphene measured by spectroscopic ellipsometry / Appl. Phys. Lett 97:091904
H. G. Tompkins / 1999 / Spectroscopic Ellipsometry and Reflectometry: A user’s Guide / Wiley
D. Aspnes / 2004 / Expanding horizons: new developments in ellipsometry and polarimetry / Thin Solid Films 455-456:3~13
A. Dejneka / 2009 / Spectroscopic ellipsometry applied to phase transitions in solids : possibilities and limitations / Opt. Express 17:14322~14338
J. W. Weber / 2010 / Optical constants of graphene measured by spectroscopic ellipsometry / Appl. Phys. Lett 97:091904
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