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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2021.12
- 수록면
- 730 - 737 (8page)
이용수
초록· 키워드
오류제보하기
Transmission spectra are measured from waveguide-coupled ring resonators fabricated with SiN<SUB>x</SUB> on SiO₂. By using ring resonators with various radii and several index contrasts, the behavior of the quality factors is investigated. As the index contrast decreases, the dominant loss is from scattering for a large resonator, while that changes from scattering loss to bending loss for a small resonator. We verify that the quality factor can be drastically improved by reducing the index contrast in large ring resonators.
목차
Ⅰ. INTRODUCTION
Ⅱ. DEVICE FABRICATION AND MEASUREMENTS
Ⅲ. RESULTS AND DISCUSSION
Ⅳ. CONCLUSION
REFERENCES
참고문헌 (39)
참고문헌 신청
D. J. Blumenthal / 2018 / Silicon nitride in silicon photonics / Proc. IEEE 106:2209~2231
A. Frigg / 2019 / Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films / Opt. Express 27:37795~37805
T. Sharma / 2020 / Review of recent progress on silicon nitridebased photonic integrated circuits / IEEE Access 8:195436~195446
L. Tsybeskov / 2009 / Silicon photonics: CMOS going optical / Proc. IEEE 97:1161~1165
M. J. R. Heck / 2013 / Hybrid silicon photonic integrated circuit technology / IEEE J. Sel. Top. Quantum Electron 19:6100117
A. Frigg / 2019 / Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films / Opt. Express 27:37795~37805
T. Sharma / 2020 / Review of recent progress on silicon nitridebased photonic integrated circuits / IEEE Access 8:195436~195446
L. Tsybeskov / 2009 / Silicon photonics: CMOS going optical / Proc. IEEE 97:1161~1165
M. J. R. Heck / 2013 / Hybrid silicon photonic integrated circuit technology / IEEE J. Sel. Top. Quantum Electron 19:6100117
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