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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2022.2
- 수록면
- 44 - 50 (7page)
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초록· 키워드
오류제보하기
An off-axis zone plate is able to focus on a single order while neglecting the zeroth order in a visible imaging system. This allows one to enhance the contrast quality in diffractive images, which is the major advantage of this type of zone plate. However, most previous reflection zone plates are used in focusing X-rays with a small grazing incident angle and are intricately designed with the use of a local grating period. In this study, we suggest the design of an off-axis elliptical zone plate (EZP) that is used to focus a monochromatic light beam with separation between the first and unfocused orders under a large grazing incident angle of 45°. An assumption using the total grating period, which depends on the average and constant grating period, is proposed to calculate the desired distance between the first and zeroth order and to simplify the construction of a novel model off-center EZP. Four diffractive optical elements (DOEs) with different parameters were subsequently fabricated by direct laser lithography and then verified using a performance evaluation system to compare the results from the assumption with the experimental results.
목차
Ⅰ. INTRODUCTION
Ⅱ. DESIGN OF REFLECTIVE ELLIPTICAL ZONE PLATE
Ⅲ. FABRICATION PROCESS
Ⅳ. PERFORMANCE VERIFICATION
Ⅴ. CONCLUSION
REFERENCES
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