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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2015.10
- 수록면
- 494 - 502 (9page)
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초록· 키워드
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This paper introduces methods to measure vibration using a fringe pattern. These methods use variationsof a fringe pattern in reflective monochromatic interferometry, without additional components. With theproposed methods we measured the vibrations of four waveform with amplitude 100 nm. When thevibrational amplitude is greater than a quarter wavelength of the light employed, however, the measuredresults are distorted due to ambiguity. Thus we propose advanced methods to solve this problem, and alsomeasure the vibrations of two waveformswith an amplitude of 1 μm. To verify the performance of theproposed methods, we compare the results to those from an accelerometer. Multifrequency vibrations of1, 5, 10, and 20 Hz are measured by both techniques, and the results compared in the frequency domain
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참고문헌 (23)
참고문헌 신청
조태영 / 2014 / Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry / Current Optics and Photonics 18(3):236~243
현창홍 / 2014 / Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry / Current Optics and Photonics 18(5):531~537
조태영 / 2013 / 3D Measurement of TSVs Using Low Numerical Aperture White-Light Scanning Interferometry / Journal of the Optical Society of Korea 17(4):317~322
G. Pedrini / 1994 / Double-pulse electronic speckle interferometry for vibration analysis / Appl. Opt 33:7857~7863
S. Nakadate / 1986 / Vibration measurement using phase-shifting speckle-pattern interferometry / Appl. Opt 25:4162~4167
현창홍 / 2014 / Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry / Current Optics and Photonics 18(5):531~537
조태영 / 2013 / 3D Measurement of TSVs Using Low Numerical Aperture White-Light Scanning Interferometry / Journal of the Optical Society of Korea 17(4):317~322
G. Pedrini / 1994 / Double-pulse electronic speckle interferometry for vibration analysis / Appl. Opt 33:7857~7863
S. Nakadate / 1986 / Vibration measurement using phase-shifting speckle-pattern interferometry / Appl. Opt 25:4162~4167
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