Formation Mechanism of Thermally Optimized Ga-Doped MgZnO Transparent Conducting Electrodes for GaN-Based Light-Emitting Diodes

장선호; 조용륜; 이영웅                                         /Young-Woong Lee; 김세민                                         /Sei-Min Kim; 김봉중; 배재현; Huei-Chun An; 장자순

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자료유형: 학술저널

저자정보: 장선호 조용륜 이영웅 /Young-Woong Lee 김세민 /Sei-Min Kim 김봉중 배재현 Huei-Chun An 장자순

저널정보: 대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.11 No.3

발행연도: 2015.1

수록면: 494 - 499 (6page)

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We report a highly transparent conducting electrode (TCE) scheme of MgxZn1-xO:Ga/Au/NiOx which was deposited on p-GaN by e-beam for GaN-based light emitting diodes (LEDs). The optical and electrical properties of the electrode were optimized by thermal annealing at 500 °C for 1 minute in N2 + O2 (5:3) ambient. The light transmittance at the optimal condition increased up to 84 - 97% from the UV-A to yellow region. The specific contact resistance decreased to 4.3(±0.3) × 10−5 Ωcm2. The improved properties of the electrode were attributed to the directionally elongated crystalline nanostructures formed in the MgxZn1-xO:Ga layer which is compositionally uniform. Interestingly, the Au alloy nano-clusters created in the MgxZn1-xO:Ga layer during annealing at 500°C may also enhance the properties of the electrode by acting as a conducting bridge and a nano-sized mirror. Based on studies of the external quantum efficiency of blue LED devices, the proposed electrode scheme combined with an optimized annealing treatment suggests a potential alternative to ITO.

#transparent conducting electrode (TCE) #MgxZn1-xO #LED #external quantum efficiency (EQE) #ohmic contact

참고문헌 (31)

참고문헌 신청

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