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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2014.1
- 수록면
- 565 - 569 (5page)
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초록· 키워드
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ITO and ITO:Zr films with various thicknesses were prepared on glass substrates by RF magnetron sputtering. We observed a decrease in sheet resistance with increasing film thickness that in good agreement with Fuchs-Sondheimer theory. The ITO films doped with ZrO2 (~0.2 wt%) showed improvement in some of the electricaland optical properties of ITO films. The surface roughness of ITO:Zr films increased with increasingfilm thickness. ITO:Zr films with thickness of 120 nm showed highest work function of 5.13 eV, as estimatedfrom XPS data. The ITO:Zr films were employed as front electrodes in HIT solar cells; the best device performancewas found to be: Voc = 710 mV, Jsc = 34.44 mA/cm2, FF = 74.8%, η = 18.30% at a thickness of 120nm. A maximum quantum efficiency (QE) of 89% was recorded for HIT solar cells at a wavelength of700 nm for 120 nm thick ITO:Zr films.
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참고문헌 (24)
참고문헌 신청
조신호 / 2009 / Effects of Growth Temperature on the Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering / Transactions on Electrical and Electronic Materials 10(6):185~188
Joon Hong Park / 2007 / Properties of ITO Films Deposited with Different Conductivity ITO Targets / Metals and Materials International 13(6):475~478
이유림 / 2009 / Effect of Ambient Gases on the Characteristics of ITO Thin Films for OLEDs / Transactions on Electrical and Electronic Materials 10(6):203~207
B. Zhang. / 2007 / Mat. Sci. Semicon. Proc 10:264
T. A. Gessert. / 2011 / Thin. Solid. Films 519:7146
Joon Hong Park / 2007 / Properties of ITO Films Deposited with Different Conductivity ITO Targets / Metals and Materials International 13(6):475~478
이유림 / 2009 / Effect of Ambient Gases on the Characteristics of ITO Thin Films for OLEDs / Transactions on Electrical and Electronic Materials 10(6):203~207
B. Zhang. / 2007 / Mat. Sci. Semicon. Proc 10:264
T. A. Gessert. / 2011 / Thin. Solid. Films 519:7146
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