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논문 기본 정보

자료유형
학술저널
저자정보
Mengrui Liu (Hebei University of Technology) Da Yin (Hebei University of Technology) Baimei Tan (Hebei University of Technology) Fan Yang (Hebei University of Technology) Xiaoqin Sun (Hebei University of Technology) Pengcheng Gao (Hebei University of Technology) Shihao Zhang (Hebei University of Technology) Yazhen Wang (Hebei University of Technology)
저널정보
대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.17 No.1
발행연도
2021.1
수록면
109 - 118 (10page)

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The adsorption and passivation reactions of 5-methyl benzotriazole (MBTA) with different copper samples (as received, citricacid treated and citric acid and KIO4treated) were studied. The experiments were characterized by contact angle measurement,potentiodynamic polarization curve, electrochemical impedance spectroscopy and X-ray photoelectron spectroscopy. The results showed that the adsorption behavior of MBTA on different treated surfaces was different and MBTA was preferentiallyadsorbed on the surface of citric acid treated copper. Based on the density functional theory, quantum chemicaldescriptors such as the frontier molecular orbital energies EHOMO,ELUMOand the energy gap between them, molecularelectrostatic potential, and Fukui function had been calculated and discussed. The adsorption mechanism of MBTA andcopper surface was further revealed, which had positive significance for the corrosion inhibition of copper surface in copperinterconnection CMP.

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