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Study on Ultra-precision Machining of Si Optics Using Laser-assisted Machining
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레이저 보조가공을 이용한 Si 광학부품의 초정밀 가공에 관한 연구

논문 기본 정보

Type
Academic journal
Author
Dae Ho Kim (Chungnam National University) Jun Hee Hong (Chungnam National University)
Journal
The Korean Society of Manufacturing Technology Engineers Journal of the Korean Society of Manufacturing Technology Engineers Vol.30 No.5 KCI Accredited Journals
Published
2021.10
Pages
339 - 344 (6page)
DOI
10.7735/ksmte.2021.30.5.339

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Study on Ultra-precision Machining of Si Optics Using Laser-assisted Machining
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Abstract· Keywords

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The performance of optical components is sensitive to the surface roughness; hence, ultra-precision machining technique is significantly important. In this paper, ultra-precision machining and laser-assisted machining was performed; We evaluated them as methods for machining of silicon, an infrared optical component material. Machining brittle material by a diamond turning machine is challenging; laser-assisted machining resolves this issue. For instance, Si is an optical material with superior optical characteristics; however, Si usage is limited due to poor machinability. In contrast, Si can be machined with good surface roughness using laser-assisted machining. We obtained a surface roughness under Ra 10 nm, form accuracy under Pt 250 nm at the found optimal machining condition.

Contents

ABSTRACT
1. 서론
2. 실험 장비 및 방법
3. 레이저 보조 가공 실험 결과 및 고찰
4. 결론
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UCI(KEPA) : I410-ECN-0101-2021-003-002092034