지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2014.1
- 수록면
- 13 - 19 (7page)
이용수
이 논문의 연구 히스토리 (2)
- 이 논문의 후속연구가 궁금하신가요?
- 연관 학술논문 또는 학술발표를 통해 보다 발전된 연구결과를 확인하실 수 있습니다.
- 이 논문의 연구 히스토리 확인하기
초록· 키워드
오류제보하기
Phosphoric acid was used as etching agent instead of conventional peroxide - based chemicals for forming pattern of ultra definition display. Etchant was synthesized by mixing etching agent, oxidation agent, buffer solution, and additive into solvent, deionized water. Thicknesses of copper, main metal of ultra definition display, for etching, were 10,000 and $30,000{{\AA}}$. Etch stop of good low skew for proper pattern formation has been occurred at the content ratio of phosphoric acid 60 - 64%, nitric acid 4 - 5%, additive(potassium acetate) 1 - 3%. Buffer solution(acetic acid) decreased the metal contact angle $63.07^{\circ}$ to $42.49^{\circ}$ for benefiting pattern formation. Content variations on four components (phosphoric acid, nitric acid, acetic acid, potassium acetic acid) of the etchant with storage time were within 3 wt% after 24 hrs of etching work.
목차
등록된 정보가 없습니다.
참고문헌 (12)
참고문헌 신청
Denny A. Jones / 1996 / Principles and Prevention of Corrosion / Prentice Hall :168~175
H. Otmacic / 2004 / Protective properties of an inhibitor layer formed on copper in neutral chloride solution / J. Appl. Electrochem 34:545~550
E. M. Sherif / 2006 / 2-amino-5-ethyl-1, 3, 4-thiazole as a corrosion inhibitor for copper in 3. 0% NaCl solutions / Corr. Sci. 48:4065~4079
C. Whitman / 1999 / Ultralarge scale integrated metallization and interconnects / J. Vac. Sci. Technol 17:1893~1879
T. M. Karonge / 1999 / The basic and not basics of water corrosion processes altered by flow changes / corrosion 99:25~30
H. Otmacic / 2004 / Protective properties of an inhibitor layer formed on copper in neutral chloride solution / J. Appl. Electrochem 34:545~550
E. M. Sherif / 2006 / 2-amino-5-ethyl-1, 3, 4-thiazole as a corrosion inhibitor for copper in 3. 0% NaCl solutions / Corr. Sci. 48:4065~4079
C. Whitman / 1999 / Ultralarge scale integrated metallization and interconnects / J. Vac. Sci. Technol 17:1893~1879
T. M. Karonge / 1999 / The basic and not basics of water corrosion processes altered by flow changes / corrosion 99:25~30
이 논문의 저자 정보
최근 본 자료
댓글(0)
0