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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2013.1
- 수록면
- 69 - 74 (6page)
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Silicon (Si) wafer was grown by using direct growth from Si melt and contaminations of wafer during the process were investigated. In our process, BN was coated inside of all graphite parts including crucible in system to prevent carbon contamination. In addition, coated BN layer enhance the wettability, which ensures the favorable shape of grown wafer by proper flow of Si melt in casting mold. As a result, polycrystalline silicon wafer with dimension of $156{\times}156$ mm and thickness of $300{\pm}20$ um was successively obtained. There were, however, severe contaminations such as BN and SiC on surface of the as-grown wafer. While BN powders were easily removed by brushing surface, SiC could not be eliminated. As a result of BN analysis, C source for SiC was from binder contained in BN slurry. Therefore, to eliminate those C sources, additional flushing process was carried out before Si was melted. By adding 3-times flushing processes, SiC was not detected on the surface of as-grown Si wafer. Polycrystalline Si wafer directly grown from Si melt in this study can be applied for the cost-effective Si solar cells.
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참고문헌 (12)
참고문헌 신청
김병국 / 2011 / SOD방법을 이용한 저가 EFG 리본 실리콘 태양전지의 효율 향상에 관한 연구 / 전기전자재료학회논문지 24(3):240~244
Lee JS / 2007 / Solar Cell Engineering / Greenpress :2~18
Jang BY / 2008 / Low-cost Silicon Technologies for Photovoltaics / J. Ceram. Soc. 13:41~42
Schönecker A / 2002 / Ribbon-Growth-on-Substrate: Status, Challenges and Promises of High Speed Silicon Wafer Manufacturing / Workshop on Crystalline Silicon Solar cell Materials and Proceses 12:7~14
Seung-Jin Ko / 2010 / Polycrystalline Silicon Wafer Fabricated by Direct Growth from Liquid Silicon / Journal of the Korean Physical Society 57(1):97~102
Lee JS / 2007 / Solar Cell Engineering / Greenpress :2~18
Jang BY / 2008 / Low-cost Silicon Technologies for Photovoltaics / J. Ceram. Soc. 13:41~42
Schönecker A / 2002 / Ribbon-Growth-on-Substrate: Status, Challenges and Promises of High Speed Silicon Wafer Manufacturing / Workshop on Crystalline Silicon Solar cell Materials and Proceses 12:7~14
Seung-Jin Ko / 2010 / Polycrystalline Silicon Wafer Fabricated by Direct Growth from Liquid Silicon / Journal of the Korean Physical Society 57(1):97~102
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