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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Journal of Korean Vacuum Society Vol.12 No.S1
- 발행연도
- 2003.10
- 수록면
- 79 - 82 (4page)
이용수
초록· 키워드
오류제보하기
We present the investigation on P- and As-desorption process from the (001) InP surface in metal organic chemical vapor deposition using surface photoabsorption (SPA). The monochromatic SPA signal showed rapid initial increase to reach In-stabilized surface value after PH₃ was turned off, but in case of As-desorption, the signal showed clear existence of a metastable state after the AsH₃ was turned off. The SPA spectra at each stable surfaces were taken to confirm the interpretation. This result indicates that the As-desorption process should be understood as a two-step process, in contrast to P-desorption of one-step process.
목차
Abstract
1. Introduction
2. Experiment
3. Results and Discussion
4. Conclusions
Acknowledgments
References
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