지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.6
- 발행연도
- 2017.11
- 수록면
- 195 - 200 (6page)
이용수
초록· 키워드
오류제보하기
A mobile lab kart for plasma training is developed with a high vacuum pumping system, vacuum gauges and a glass discharge tube powered by a high voltage transformer connected to a household 60 ㎐ line. A numerical model is developed by using a commercial multiphysics software package, CFD-ACE+ to analyze the experimental data. Simulations for argon and nitrogen were carried out to provide fundamental discharge characteristics. Variations of the kart configuration were demonstrated: a glass tube with three electric probes, optical emission spectrometer attachment and infra red thermal imaging system to give more detailed analysis of the discharge characteristics.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experiment and Simulation Setup
Ⅲ. Results and Discussion
Ⅳ. Conclusions
References
참고문헌 (12)
참고문헌 신청
Y. Yoo and J. Joo, J. Kor. Inst. Surf. Eng., Vol. 46, No. 4 (2013) 168.
J. Joo, Kor. Inst. Surf. Eng., Vol. 46, No. 3 (2013) 133.
J. Joo, Kor. Inst. Surf. Eng., Vol. 45, No. 2 (2012) 53.
S. Lee, J. Kor. Vac. Soc., Vol. 18, No. 3 (2009) 176.
D. Kwon and N. Yoon, Appl. Sci. Conv. Technol., Vol. 24, No. 6 (2015) 237.
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UCI(KEPA) : I410-ECN-0101-2019-420-001276741