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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.24 No.2
- 발행연도
- 2015.3
- 수록면
- 33 - 40 (8page)
이용수
초록· 키워드
오류제보하기
ZrO₂ and Al-Zr composite oxide film was prepared by vacuum assisted sol-gel dip coating method and anodizing. ZrO₂ films annealed above 400℃ have tetragonal structure. ZrO₂ layers inside etch pits were successfully coated from the ZrO₂ sol. The double layer structures of samples were obtained after being anodized at 100 V to 600 V. From the TEM images, it was found that the outer layer was Al₂O₃, the inner layer was multi-layer of ZrO₂, Al-Zr composite oxide and Al hydrate. The capacitance of ZrO₂ coated foil exhibited about 28.3% higher than that of non-coating foil after being anodized at 100 V. The high capacitance of ZrO₂ coated foils anodized at 100 V can be attributed to the relatively high percentage of inner layer in total thickness. The electrical properties, such as withstanding voltage and leakage current of coated and non-coated Al foils showed similar values. From the results, ZrO₂ and Al-Zr composite oxide is promising to be used as the partial dielectric of high voltage capacitor to increase the capacitance.
목차
I. Introduction
II. Experimental Procedures
III. Results and Discussion
IV. Conclusions
References
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UCI(KEPA) : I410-ECN-0101-2019-420-001275466