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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
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Due to the miniaturization of semiconductor devices, their crystal structure on the nanoscale must be analyzed. However, scanning electron microscope-electron backscatter diffraction (EBSD) has a limitation of resolution in nanoscale and high-resolution electron microscopy (HREM) can be used to analyze restrictive local structural information. In this study, three-dimensional (3D) automated crystal orientation and phase mapping using transmission electron microscopy (TEM) (3D TEM-EBSD) was used to identify the crystal structure relationship between an epitaxially grown CdS interfacial layer and a Cu(InxGax-1)Se2 (CIGS) solar cell layer. The 3D TEM-EBSD technique clearly defined the crystal orientation and phase of the epitaxially grown layers, making it useful for establishing the growth mechanism of functional nano-materials.
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참고문헌 (14)
참고문헌 신청
Caro L D / 1998 / Validity of Vegard’s rule for the lattice parameter and the stiffness elastic constant ratios of the AlGaAs ternary compound / Solid State Commun 108 : 599
Darakchieve V / 2008 / Effects of strain and composition on the lattice parameters and applicability of Vegard’s rule in Al rich Al1-xInxN films grown on sapphire / J. Appl.
Kaneshiro J / 2010 / Advances in copper-chalcopyrite thin films for solar energy conversion / Sol. Energy Mater. Sol. Cells 94 : 12 ~ 16
Kaur I / 1980 / Growth kinetics and polymorphism of chemically deposited CdS films / J. Electrochem. Soc 127 : 943 ~ 948
Kousuke T / 2011 / Preparation and characterization of Co/Pd epitaxial multilayer films with different orientations / Jpn. J. Appl. Phys 50 : 073001 ~ 073001
Darakchieve V / 2008 / Effects of strain and composition on the lattice parameters and applicability of Vegard’s rule in Al rich Al1-xInxN films grown on sapphire / J. Appl.
Kaneshiro J / 2010 / Advances in copper-chalcopyrite thin films for solar energy conversion / Sol. Energy Mater. Sol. Cells 94 : 12 ~ 16
Kaur I / 1980 / Growth kinetics and polymorphism of chemically deposited CdS films / J. Electrochem. Soc 127 : 943 ~ 948
Kousuke T / 2011 / Preparation and characterization of Co/Pd epitaxial multilayer films with different orientations / Jpn. J. Appl. Phys 50 : 073001 ~ 073001
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