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In this study, liquid crystal (LC) aligning properties for homeotropic alignment on the SiOx thin film by electron beam evaporation method with electron beam system in accordance with the evaporation angles were investigated. Also, the control of pretilt angles homeotropic aligned LC on SiOx thin film as the function of the evaporation angles were studied. The uniform vertical LC alignment on the SiOx thin film surfaces with electron beam evaporation was achieved with all of the thin film angle conditions. It is considerated that the LC alignment on the SiOx thin film by electron beam evaporation is attributed to elastic interaction between LC molecules and micro-grooves at the SiOx thin film surface created by evaporation. The values of the pretilt angles according to the evaporation angle were from about 0.7 ° to about 3.4 °. The highest pretilt angles of about 3.4 ° in aligned NLC on the SiOx thin film surfaces by electron beam evaporation were measured under the condition of 45 °. Also, good LC alignment states on the treated SiOx thin film layer by electron beam evaporation were observed at annealing temperature of 250 ℃. Consequently, the high pretilt angle and the good thermal stability of LC alignment on the SiOx thin film by electron beam evaporation can be achieved.

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