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자료유형
학술저널
저자정보
저널정보
한국현미경학회 한국현미경학회지 한국현미경학회지 제46권 제1호
발행연도
2016.1
수록면
27 - 31 (5page)

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It has been investigated what kind of characteristic X-ray in electron probe micro-analyzer (EPMA) is effective for the determination of compounds of Si series materials. After comparing the characteristic X-rays among the primary and secondary lines in Kα and Kβ obtained from the Si series standard samples, it was found that the secondary line of Kα exhibited the most informative spectrum although the intensity was considerably weak. As a result of analyzing the spectrum shapes of the Si series standard samples, the spectrum shape of the secondary line of Kα for SiC was different from those for other Si compounds. To grasp the characteristics of the shape, a line was perpendicularly drawn from the peak top to base line in order to divide a spectrum into two areas. The area ratio of right to left was def ned to call as the asymmetry index here. As a result, the asymmetry index value of the SiC was greater than one, while those of other Si compounds were less than one. It was found from the EPMA analysis that identif cation of SiC became successful to distinguish from other Si compounds and this method was applicable for micro-sized compounds in a practical composite material.

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