Characteristics of low temperature cobalt thins films deposited by VHF PEALD (60 and 100 MHz)

Won Kyun Yeom ,  Chang Hoon Song ,  Geun Young Yeom

한국진공학회 학술발표회초록집

2020 .02

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Plasma enhanced atomic layer deposition of silicon nitride films using a VHF (162 ㎒) multi-tile push-pull plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .08

초고주파 (162 MHz) 다중 분할 전극 플라즈마 소스를 이용한 silicon nitride PEALD 공정연구

지유진 ,  김기석 ,  김기현 외 5명

한국진공학회 학술발표회초록집

2019 .08

Charateristic of cobalt thin films deposited by VHF PE-ALD (60 and 100 ㎒) using cobaltocene(Co(Cp)₂/NH₃

Won gyun Yeom ,  Chang hoon Song ,  Chul hee Cho 외 2명

한국진공학회 학술발표회초록집

2020 .08

CO oxidation catalyzed by NiO/mesoporous Al₂O₃

Sang Wook Han ,  Dae Han Kim ,  Eun Ji Pa 외 6명

한국진공학회 학술발표회초록집

2015 .02

In-situ formation of co particles encapsulated by graphene layers

Lee Minjeong ,  Kim Gyutae ,  Jeong Gyu Hyun 외 4명

한국현미경학회지

2022 .03

Atomic Layer Deposited Metal Thin Films on T-shirts

Han-Bo-Ram Lee

한국진공학회 학술발표회초록집

2017 .08

Application of Atomic Layer Deposition to Solid Oxide Fuel Cells Based on Nanoscale Electrode Modification

Jiwon Oh ,  Heesu Hwang ,  Seungmuk Bae 외 1명

한국진공학회 학술발표회초록집

2018 .08

Deposition and characterization of inorganic thin films by using UV-enhanced Atomic Layer Deposition

정진원 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

Layer controlled TMDC films by sulfurization of W film deposited by ALD method via Metal-Organic Chemical Vapor Deposition

이유빈 ,  이진석

한국진공학회 학술발표회초록집

2018 .02

Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition

송종수 ,  윤홍로 ,  성명모

한국진공학회 학술발표회초록집

2016 .02

Novel organic-inorganic thin films with monolayer precision using molecular layer deposition (MLD) and atomic layer deposition (ALD)

윤관혁 ,  김인정 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

A study on the standardization for the analysis method of recycled cobalt metals through the urban mining

Deok-jun KWEON ,  Young-ki KIM ,  Won-pyo HONG 외 3명

한국분석과학회 학술대회

2016 .11

Cobalt-Iron Stacks for High Performance Electric Motors

Robe ,  t B ,  and 외 5명

한국자기학회 학술연구발표회 논문개요집

2024 .05

Effects of Redeposition on Low-Temperature Plasma Enhanced-Atomic Layer Deposition of Silicon Nitride Thin films for the Encapsulation layer of flexible OLEDs

김지민 ,  김성민 ,  김형준

한국진공학회 학술발표회초록집

2018 .02

A Brief Review of Plasma Enhanced Atomic Layer Deposition of Si₃N₄

You Jin Ji ,  Ki Seok Kim ,  Ki Hyun Kim 외 2명

Applied Science and Convergence Technology

2019 .09

Achieving New Phases and Functionality in ALD Thin Films for Next Generation Electronics

Vi ,  ginia Wheele ,  Alex Kozen 외 16명

한국진공학회 학술발표회초록집

2018 .08

Dependence of Structural and Magnetic Properties on Annealing Times in Co-precipitated Cobalt Ferrite Nanoparticles

Budi Pu ,  nama ,  Rafika Rahmawati 외 4명

Journal of Magnetics

2015 .09