Research on parallelization mechanism of inductively coupled plasma for large area plasma source

이장재 ,  김시준 ,  김광기 외 5명

한국진공학회 학술발표회초록집

2016 .02

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Elemental analysis of rice using laser ablation inductively coupled plasma mass spectrometry(LA-ICP-MS)

Seyeon kim ,  Sung-Youn Kim ,  Dong-jin Kang 외 4명

한국분석과학회 학술대회

2022 .11

Transformer-Coupled Toroidal Remote Plasma Source for Chamber Cleaning with NF₃ and CF₄

Duhyeon Ka ,  Jie Li ,  Heeyeop Chae 외 1명

한국진공학회 학술발표회초록집

2018 .02

Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System

Ju-Ho Kim ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2020 .08

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

Interpretation of current decrease during E - H mode transition in a cylindrical inductively coupled plasma

Jun-Hyeon Moon ,  Ho-Jun Moon ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2018 .08

Diagnostics and modeling of inductively coupled methane plasma using the electrostatic probe and plasma simulations

차주홍 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System

Tae Hyung Kim ,  Geun Young Yeom

Applied Science and Convergence Technology

2019 .09

Transformer designs considering the cooling condition of applications

Suekyung Oh ,  Sungsan Kim ,  Inseong Sohn 외 2명

한국자기학회 학술연구발표회 논문개요집

2024 .05

Effects of pulse modulation in Ar/H₂ inductively coupled plasma using fluid simulation

서권상 ,  김동현 ,  이호준

한국진공학회 학술발표회초록집

2017 .08

Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C₄F₆-Mixture-Based Inductively Coupled Plasma Characteristics

Min Young Yoon ,  Hee Jung Yeom ,  Jong-Ryul Jeong 외 2명

Applied Science and Convergence Technology

2023 .03

Effects of the Capacitive Field in an Inductively Coupled Plasma Discharge

HeeHwan Choe

Applied Science and Convergence Technology

2017 .09

유도 결합 플라즈마(ICP)에서의 구동주파수 의존성 연구

김민석 ,  김경현 ,  정진욱

한국진공학회 학술발표회초록집

2020 .02

Characteristics of Internal Linear Inductively Coupled Plasma Source Operated with Superimposed Dual Frequency

김도한 ,  지유진 ,  김태형 외 4명

한국진공학회 학술발표회초록집

2017 .02

Characteristics of Inductively Coupled Plasma Source Using Internal Linear Antenna Operated by Superimposed Dual Frequency

이수정 ,  김도한 ,  김태형 외 1명

한국진공학회 학술발표회초록집

2017 .08

Pulsed Inductively Coupled Plasma Discharge Simulation for Semiconductor Processing in 2D Axisymmetric Structure

Yejin Shon ,  So ,  a Lee 외 3명

Applied Science and Convergence Technology

2020 .11

Discrimination of geographical origin of pork belly using Inductively coupled plasma mass spectrometer (ICP-MS) with multivariate analysis

Suel hye Hu ,  Eun-Hee Chang ,  Jeong-A Choi 외 3명

한국분석과학회 학술대회

2020 .11

Etching of Ta₂O₅ thin films by inductively coupled plasma

Gwan-Ha Kim ,  KyuSung Heo

한국분석과학회 학술대회

2024 .11