Vapor Deposition Techniques for Synthesis of Two-Dimensional Transition Metal Dichalcogenides

박규남 ,  송정규 ,  박주상 외 1명

한국현미경학회지

2015 .01

Field-effect transistor characteristics of MBE-grown few-layer thick MoSe₂ with largely uniform crystallinity

Seung Jun YANG ,  In Hak LEE ,  Byoung Ki CHOI 외 2명

한국진공학회 학술발표회초록집

2016 .08

Study of plasma-polymer gate dielectrics based thin film transistor

Hyeon-Jin Seo ,  Ki-Hwan Hwang ,  Jung-Hoon Yu 외 6명

한국진공학회 학술발표회초록집

2017 .08

Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma

Aixian Zhang ,  Moo-Young Lee ,  Ho-Jun Moon 외 1명

한국진공학회 학술발표회초록집

2018 .08

Surface measurements of dielectric material degradation by repetitive dielectric barrier discharge plasma

Min Jun Kim ,  Jun Sup Lim ,  Jinsung Choi 외 2명

한국진공학회 학술발표회초록집

2020 .02

Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

Hole carrier enhancement multi-layer MoSe₂ field-effect transistor using rapid-thermal annealing

Seungjun KIM ,  Taekwang KIM ,  Hyewon DU 외 5명

한국진공학회 학술발표회초록집

2016 .08

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Synthesis and Characterization of SnO2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition Using SnCl4 Precursor and Oxygen Plasma

이동권 ,  김다영 ,  권세훈

한국진공학회 학술발표회초록집

2016 .02

Layer controlled TMDC films by sulfurization of W film deposited by ALD method via Metal-Organic Chemical Vapor Deposition

이유빈 ,  이진석

한국진공학회 학술발표회초록집

2018 .02

낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구

탁현우 ,  문룡 ,  성다인 외 3명

한국진공학회 학술발표회초록집

2020 .02

Plasma-Assisted Graphene Synthesis and Functionalization

이병주 ,  정구환

한국진공학회 학술발표회초록집

2015 .02

Electronic and optical property of MoSe₂ with substitutional doping

In Hak LEE ,  Byoung Ki CHOI ,  Min Seon GU 외 3명

한국진공학회 학술발표회초록집

2016 .08

The sterilization effects of molds by dielectric barrier discharge plasma

Yeunsoo PARK ,  Sangheum EOM ,  Jung Woo YOON 외 5명

한국진공학회 학술발표회초록집

2016 .08

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Intrinsic magnetism of 3d transition metals on MoSe₂ monolayer

Na ,  ange ,  el Batnyam 외 6명

한국자기학회 학술연구발표회 논문개요집

2024 .05

MoS2 layer etching using CF4 plasma and H2S plasma treatment

양경채 ,  박성우 ,  김경남 외 1명

한국진공학회 학술발표회초록집

2016 .02

Effect of hybrid plasma source on O radical generation in oxygen plasma

Kwan-Yong Kim ,  Kyung-Hyun Kim ,  Young-Hun Hong 외 2명

한국진공학회 학술발표회초록집

2018 .08

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Flexible Plasma Sheets

Guangsup Cho ,  Yunjung Kim

Applied Science and Convergence Technology

2018 .03