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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.15 No.1
- 발행연도
- 2015.2
- 수록면
- 1 - 6 (6page)
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초록· 키워드
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In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%~70%. Also, in this paper, more simple and convenient stress-measurement method was presented.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. REVIEW OF BASIC EQUATIONS
Ⅲ. CHIP DESIGN AND ANALYSIS
Ⅳ. SUMMARY
Ⅴ. FUTURE WORKS
REFERENCES
참고문헌 (11)
참고문헌 신청
1. [학술지(정기간행물)] - Kanda, Y / 1982 / Graphical Representation of the Piezoresistance Coefficients in Silicon / IEEE Transactions on Electron Devices 29 (1) : 64 ~ 70
2. [학술지(정기간행물)] - Bittle, D. A / 1991 / Piezoresistive Stress Sensors for Structural Analysis of Electronic Packages / Journal of Electronic Packaging 113 (3) : 203 ~ 215
3. [학술지(정기간행물)] - Matsuda, Kazunori / 1993 / Nonlinear Piezoresistance Effects in Silicon / J. Appl. Phys 73 (4) : 1838 ~ 1847
4. [학술지(정기간행물)] - Jaeger, R. C / 1994 / Errors Associated with the Design, Calibration of Piezoresistive Stress Sensors in (100) Silicon / IEEE Transactions on Components, Packaging, and Manufacturing Technology - Part B: Advanced Packaging 17 (1) : 97 ~ 107
5. [학술지(정기간행물)] - Lund, Einvind / 1999 / Measurement of the Temperature Dependency of the Piezoresistance Coefficients in p-type Silicon / EEP 26 (1) : 215 ~ 218
2. [학술지(정기간행물)] - Bittle, D. A / 1991 / Piezoresistive Stress Sensors for Structural Analysis of Electronic Packages / Journal of Electronic Packaging 113 (3) : 203 ~ 215
3. [학술지(정기간행물)] - Matsuda, Kazunori / 1993 / Nonlinear Piezoresistance Effects in Silicon / J. Appl. Phys 73 (4) : 1838 ~ 1847
4. [학술지(정기간행물)] - Jaeger, R. C / 1994 / Errors Associated with the Design, Calibration of Piezoresistive Stress Sensors in (100) Silicon / IEEE Transactions on Components, Packaging, and Manufacturing Technology - Part B: Advanced Packaging 17 (1) : 97 ~ 107
5. [학술지(정기간행물)] - Lund, Einvind / 1999 / Measurement of the Temperature Dependency of the Piezoresistance Coefficients in p-type Silicon / EEP 26 (1) : 215 ~ 218
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