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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2014.10
- 수록면
- 1,412 - 1,416 (5page)
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We report thin-film organic moisture barriers based on polystyrene(PS) laminates deposition by PECVD for an encapsulation of OLEDs. The organic polystyrene thin-film has the benzene ring structure and high hydrophobic characteristics and it was polymerized by PECVD in dry process. Life time properties of Ca test were obtained 32 minutes at the RF 100W process conditions. From the AFM test, the roughness of multi-layer thin-film was more excellent rather than that of a single-layer thin-film. In addition, 5 layers of the multi-layer film properties were obtained 45 minutes. So that the optical and electrical properties were not affected with these plasma polymerized organic thin-film encapsulation. For life time improvement, the inorganic Al2O3 thin-film were deposited 5nm using ALD atomic layer deposition. The WVTR(Water Vaper Transmission Rate) value of hybrid thin-film encapsulation in the optimum process conditions was resulted by less than 10-3g/㎡/day. From the results of experiment, plasma polymerized hybrid encapsulation was suggested as the flexible display applications.
목차
Abstract
1. 서론
2. 실험방법
3. 결과 및 고찰
3. 결론
References
참고문헌 (8)
참고문헌 신청
Kiran T. Kamtekar / 2010 / Recent advances in white organic light-emitting materials and devices / Adv. Mater 22:572
Kho, S. I. / 2002 / Passivation of Organic Light-Emitting Diodes by the Plasma Polymerized para-Xylene Thin Film / Jpn. J. Appl. Phys. 41(11B):L1336~L1338
Kim, H. K. / 2007 / High-quality thin-film passivation by catalyzer-enhanced chemical vapor deposition for organic light-emitting diodes / Applied Physics Letters 90(1):013502
Burrows, P. E. / 2001 / Gas permeation and lifetime test on polymer-based barrier coatings / Proc. SPIE 75:4105
A.A. Dameron / 2008 / Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition / J. Phys. Chem C112:4573~4580
Kho, S. I. / 2002 / Passivation of Organic Light-Emitting Diodes by the Plasma Polymerized para-Xylene Thin Film / Jpn. J. Appl. Phys. 41(11B):L1336~L1338
Kim, H. K. / 2007 / High-quality thin-film passivation by catalyzer-enhanced chemical vapor deposition for organic light-emitting diodes / Applied Physics Letters 90(1):013502
Burrows, P. E. / 2001 / Gas permeation and lifetime test on polymer-based barrier coatings / Proc. SPIE 75:4105
A.A. Dameron / 2008 / Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition / J. Phys. Chem C112:4573~4580
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UCI(KEPA) : I410-ECN-0101-2015-500-002751104