지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 Journal of Electrical Engineering & Technology Journal of Electrical Engineering & Technology Vol.9 No.2
- 발행연도
- 2014.3
- 수록면
- 514 - 522 (9page)
이용수
초록· 키워드
오류제보하기
A new type of high precision electromagnetic suspension (EMS) which can support heavy tray along long stroke rail is proposed in this paper. Compared with the conventional EMS, the suggested moving-core typed EMS has the levitation electromagnets (EMs) on the fixed rail. This scheme has high load capability caused by iron-core and enables simple tray structure. Also it does not have precision degradation caused by heat generation from EMs, which is a drawback of conventional EMS. With these merits, the proposed EMS can be an optimal contactless linear bearing in next generation flat panel display (FPD) manufacturing process if the ability of long stroke movement is proved. So a special Section Switching Algorithm (SSA) is derived from the resultant force and moment equations of the levitated tray which enables long stroke movement of the tray. In order to verify the feasibility of the suggested SSA, a simple test-setup of the EMS with 2 Section-changes is made up and servo-controlled in the simulation and experiment. The simulation shows the perfect changeover the EMs, and the experiment shows overall control performance of under ±40 μm gap deviations. These results reveal that the newly suggested contactless linear bearing can simultaneously achieve high load capability and precision gap control as well as long stroke.
목차
Abstract
1. Introduction
2. Design and Control of the EMS
3. Simulation and Experiment
4. Conclusion
References
참고문헌 (24)
참고문헌 신청
1. [학술지(정기간행물)] - W. J. Kim / 1998 / Modeling and Vector Control of Planar Magnetic Levitator / IEEE Trans. On Industry Applications 34 (6) : 1254 ~ 1262
2. [학술지(정기간행물)] - Jeong-Woo Jeon / 2012 / Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements / Journal of Electrical Engineering & Technology 7 (4) : 558 ~ 563
3. [학술대회논문] - Jeong-Woo Jeon / 2007 / Development of Magnetic Levitated Stage for Wide Area Movement / Proceedings of International Conference on Electrical Machines and Systems (ICEMS) : 1486 ~ 1491
4. [학술지(정기간행물)] - C. M. M van Lierop / 2009 / Model-Based Commutation of a Long-Stroke Magnetically Levitated Linear Actuator / Industry Applications, IEEE Transactions on 45 (6) : 1982 ~ 1990
5. [학술지(정기간행물)] - Jeroen de Boeij / 2009 / Contactless Planar Actuator With Manipulator : A Motion System Without Cables and Physical Contact Between the Mover and the Fixed World / Industry Applications, IEEE Transactions on 45 (6) : 1930 ~ 1938
2. [학술지(정기간행물)] - Jeong-Woo Jeon / 2012 / Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements / Journal of Electrical Engineering & Technology 7 (4) : 558 ~ 563
3. [학술대회논문] - Jeong-Woo Jeon / 2007 / Development of Magnetic Levitated Stage for Wide Area Movement / Proceedings of International Conference on Electrical Machines and Systems (ICEMS) : 1486 ~ 1491
4. [학술지(정기간행물)] - C. M. M van Lierop / 2009 / Model-Based Commutation of a Long-Stroke Magnetically Levitated Linear Actuator / Industry Applications, IEEE Transactions on 45 (6) : 1982 ~ 1990
5. [학술지(정기간행물)] - Jeroen de Boeij / 2009 / Contactless Planar Actuator With Manipulator : A Motion System Without Cables and Physical Contact Between the Mover and the Fixed World / Industry Applications, IEEE Transactions on 45 (6) : 1930 ~ 1938
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UCI(KEPA) : I410-ECN-0101-2015-500-001097243